Nyob rau ntawm cov pab pawg tsis muaj kev pab pawg, peb engineer precermite platform manable muaj peev xwm ua tiav nanometer - qib tiaj thiab ruaj khov. Txawm li cas los xij, kev ncaj ncees ntawm cov ntiaj teb no {{2} Chav Kawm Cheeb Tsam pib ntev ua ntej lawv tawm ntawm peb lub Iso {}} nws pib nrog kev teeb tsa lub hauv paus. Rau siab siab -} Cov ntawv thov raug, los ntawm kev kawm qib siab rau semiconductor hauv paus, hauv pem teb tsis yog txhawb; Nws yog qhov txuas ntxiv ntawm qhov ntsuas nws tus kheej. Lub hauv paus tsis zoo tuaj yeem cuam tshuam rau lub platform daim ntawv lees paub, muab cov khoom siv granite zoo tshaj plaws.
Qhov kev lag luam tseem ceeb: flatness, thauj khoom, thiab ruaj khov
Tsim lub hauv paus rau ib qho ultra - Lub Neej Yuav Tsum Muaj Kev Siv Hluav Taws Xob (ceev)} anti - kev tswj / kev tswj kev co.
1. Lub hauv paus Florness: tshem tawm kev ntxhov siab thiab distortion
Lub luag haujlwm tseem ceeb ntawm lub hauv paus kev ncaj ncees yog kom ntseeg tau tias cov pob zeb granite tau txais kev txhawb nqa ntawm txhua qhov taw tes lossis chaw nyob. Txawm tias ib qho kev tsis txaus ntseeg me ntsis tuaj yeem txhais rau hauv kev ntxhov siab hauv Granite Cov Qauv, tsis tau muaj kev puas tsuaj, tsis tau ua kom lub ntiaj teb xav tau qhov tseeb.
Thaum lub hauv paus granite yog leveled siv cov JANSTABLE siv cov tshuab txhawb nqa, cov mechanism no yog tsim qauv, tsis yog rau kev them nyiaj hauv pem teb tsis sib xws. Peb pom zoo kom cov pob zeb ua lossis cov pob zeb steel nyob saum npoo aching rau thawj lub tiaj tiaj tiaj tus ± 0.1 hli ib meter. Rau qhov loj tshaj plaws thiab feem ntau xav tau cov ntawv thov {4} Zoo li peb 20 m ua qhov tseem ceeb yog qhov tseem ceeb rau kev txhawb nqa ko taw tau tag nrho thiab tsis {}}} ntxhov siab rau.
2. Load - bearing muaj peev xwm: dhau ntawm qhov hnyav
Muab cov ntaub ntawv zoo dua ntawm cov ntaub ntawv tsis sib xws, qhov hnyav ntawm cov av granite yog ntau yam. Lub hauv paus yuav tsum tau xam kom tau txais tus kheej {{1} Qhov hnyav ntawm lub platform ntxiv (cov khoom siv, workpieces, thiab fixtures) nrog rau kev nyab xeeb los ntawm 1.5 txog 2.5.
Tseem ceeb tshaj, lub hauv paus yuav tsum tiv thaiv lub zog hauv zos. Cov ntsiab lus sib cuag nyob rau hauv lub platform pab txhawb mloog lub nra rau thaj chaw me me. Cov txheej txheem hauv qab yuav tsum ua kom ruaj khov los tiv thaiv ib qho kev sib tsoo lossis micro - kev hais daws nyob hauv qab no cov ntsiab lus load no. Tsim nyog faib cov khoom yog qhov tseem ceeb los khaws cov qauv txheej txheem ntawm ob lub hauv paus thiab cov granite puag saum nws.
3. Anti {{{- ribration thiab kev sib cais ua ke: qhov kev ntsuam xyuas ruaj khov qhov kawg
Qhov no yog kev sib cav sib ceg tshaj plaws, tshwj xeeb rau platforms ua tiav nanometer {{0} nplai ntsuas qhov ntsuas qhov tseeb. Ib qho ntev - lub sij hawm, kev sib cav sib txawv {{3} Qhov chaw ntawm lub hauv paus {}}}}}}} yuav dist distort cov granite puag.
Yuav kom ua tiav qhov tsim nyog ruaj khov, lub hauv paus yuav tsum tau tsim los ua qhov loj heev, feem ntau xav tau ib qho tob tob tshaj $ 500 mm $ kom nce ruaj khov av txheej thiab ua kom ruaj khov thiab inertial ruaj khov. Qhov tseem ceeb, lub hauv paus yuav tsum muaj kev sib cais kev sib cais kev sib cais ntsuas ntsuas. Raws li tau pom los ntawm peb tus kheej 10,000 ㎡ Kub Kub {{5} Txoj Kev Kawm Tawv Kev Ua Si, thiab 500 MM dav thiab 2000 Hli dav) ncig puag ncig. Qhov kev cais tawm ntawm cov kis tau tus nqi qis {{10} chaw thaj chaw ntawm cov tshuab uas nyob ib sab, lossis sab nraud tsheb mus rau hauv lub platform ua haujlwm ib puag ncig ua haujlwm tiag tiag.
Qhov tsis muaj kev cog lus tsis zoo
Peb txoj kev coj ua lub tswv yim yog "yog tias koj tsis tuaj yeem ntsuas nws, koj tsis tuaj yeem tsim nws." Lub ntsiab cai no txuas ncaj qha rau ib puag ncig peb nruab peb cov khoom hauv.