Hauv kev nrhiav tsis tu ncua ntawm 2nm txheej txheem node thiab dhau mus, kev lag luam semiconductor feem ntau tsom mus rau lub tshuab nqus tsev, EUV lub teeb ci, thiab cov sensors sophisticated. Txawm li cas los xij, qhov tseem ceeb tshaj plaws "tus khub ntsiag to" hauv qhov sib npaug no yog lub hauv paus ntawm kev siv tshuab. Raws li wafer tshuaj xyuas cov khoom xav tau sub-nanometer daws teeb meem, cov qauv kev ncaj ncees muab los ntawm granite metrology puag lossis ib qhoepoxy granite puagtau dhau los ua qhov kev txiav txim siab hauv kev ua tiav qhov ua tau zoo dua qub.
Qhov Kev Sib Tw Ntawm Kev Tshawb Fawb Niaj Hnub No
Rau semiconductor metrology, cov yeeb ncuab tseem ceeb yog kev co thiab thermal instability. Raws li cov scanners thiab cov cuab yeej tshuaj ntsuam txav mus rau ntawm qhov nrawm dua kom nce kev nkag mus, lawv tsim cov zog inertial uas tuaj yeem cuam tshuam qhov ntsuas qhov tseeb. Tus qauv steel lossis cam khwb cia- hlau thav duab, thaum muaj zog, tsis muaj qhov damping sab hauv tsim nyog los dissipate cov micro- vibrations sai txaus rau tom ntej - tiam scanning yuav tsum tau.
Qhov no yog qhov uas cov ntaub ntawv tshawb fawb tom qab UNPARALLELED cov kev daws teeb meem dhau los ua qhov tseem ceeb. Los ntawm kev muab lub platform loj, ultra- ruaj khov, peb xyuas kom meej tias cov huab cua puag ncig tuaj yeem ua haujlwm ntawm qhov ua tau zoo tshaj plaws yam tsis muaj kev cuam tshuam sab nraud lossis sab hauv.
Ntuj Granite vs. Epoxy Granite: Xaiv Txoj Cai Foundation
Ntawm UNPARALLELED Group, peb muab cov kev daws teeb meem ntuj thiab hluavtaws, raws li txhua tus ua haujlwm sib txawv hauv cov txheej txheem siab -precision ecosystem.
1. Qhov Zoo Tshaj Plaws ntawm Ntuj Granite. Tau ntau xyoo, granite metrology puag yog tus qauv kub. Nws qhov txiaj ntsig tseem ceeb yog nyob rau hauv nws qhov kev ruaj ntseg zoo heev thiab qis coefficient ntawm thermal expansion. Vim tias ntuj granite muaj hnub nyoog ntau lab xyoo, nws tsis muaj kev ntxhov siab sab hauv. Rau static metrology lossis cov cuab yeej xav tau qhov siab tshaj plaws ntawm qhov chaw tiaj tus (feem ntau Qib 000), ntuj granite tseem unbeatable.
2. Lub Engineering Flexibility ntawm Epoxy Granite Raws li kev tsim cov khoom siv tshuaj ntsuam xyuas wafer ua nyuaj, epoxy granite hauv paus (mineral casting) tau txais txiaj ntsig tseem ceeb. Cov ntaub ntawv no muaj cov pob zeb xaiv sib txuas nrog siab -kev ua haujlwm resins.
Tshwj xeeb Damping: Epoxy granite muaj kev vibration -damping tus nqi ze li kaum npaug zoo dua li cam khwb cia hlau thiab ntau dua li ntuj pob zeb. Qhov no tso cai rau kom nrawm dua "sijhawm sijhawm" rau lub siab -ceev huab cua ceev.
Kev sib xyaw ua ke: Peb tuaj yeem nrum cov yam ntxwv nyuaj ncaj qha rau hauv lub hauv paus- xws li cov kav dej txias, cov hlua khi, thiab cov kab txuas txuas ntxiv -txo "Tag nrho cov nqi ntawm cov tswv" rau OEMs.
Optimizing Air Bearing Stage Interface
Ib qho huab cua bearing theem tsuas yog zoo li qhov chaw nws ntab rau. Hauv kev siv semiconductor, qhov sib txawv ntawm huab cua feem ntau tsawg dua 10 micrometers. Txhua qhov sib txawv hauv qhov flatness ntawm lub hauv paus ua rau muaj qhov yuam kev ncaj qha hauv lub wafer lub focal dav hlau.
UNPARALLELED siv txhais tes siab heev-lapping cov txheej txheem ua ke nrog laser interferometry los xyuas kom meej tias peb lub hauv paus muab qhov ze - dav hlau zoo meej. Los ntawm kev sib koom ua ke ntawm lub hauv paus thiab cov lus qhia kev taw qhia rau hauv ib qho, cohesive unit, peb txo cov pawg - txog ntawm cov neeg kho tshuab kam rau ua. Qhov kev sib koom ua ke no yog vim li cas cov tuam txhab khoom siv semiconductor tau txav deb ntawm ntau -ib feem sib dhos mus rau kev sib xyaw ntxhia los yog cov qauv monolithic granite.
Qhov tsis zoo ntawm qhov tsis sib xws hauv Ntiaj Teb Kev Tshawb Fawb
Lub ntiaj teb no semiconductor mov saw yuav tsum muaj ntau tshaj li ib qho khoom siv; nws yuav tsum muaj tus khub uas nkag siab txog cov nuances ntawm kev sib haum xeeb ntawm chav huv, cov qauv kev tawm dag zog, thiab kev cia siab ntev ntawm -lub sij hawm geometric. UNPARALLELED Group qhov kev txawj ntse nyob rau hauv ob qho tib si ntuj pob zeb thiab pob zeb hauv av casting tso cai rau peb muab kev sib tham tsis ncaj ncees rau peb cov neeg siv khoom.
Los ntawm qhov pib Finite Element Analysis (FEA) mus rau qhov kawg precision lapping, peb cov txheej txheem yog tsim los xyuas kom meej tias koj semiconductor metrology cuab yeej muab tau lub siab tshaj plaws yield. Hauv kev lag luam uas txhua tus nanometer suav, peb muab kev ruaj ntseg uas koj tuaj yeem tsim tau.
Xaus: Engineering yav tom ntej ntawm Stability
Cov evolution ntawm wafer tshuaj xyuas cov cuab yeej yuav txuas ntxiv mus thawb cov ciam teb ntawm physics. Txawm hais tias koj daim ntawv thov yuav tsum muaj kev ruaj ntseg classic ntawm granite metrology puag lossis siab -damping, complex geometry ntawm ib qhoepoxy granite puag, UNPARALLELED Group sawv ntawm lub hauv ntej ntawm no foundational technology. Peb caw engineers thiab system integrators los tshawb nrhiav seb peb cov ntaub ntawv tuaj yeem txo cov peev nyiaj yuam kev ntawm lawv cov txheej txheem tom ntej - tiam.