Wafer ua cov khoom siv yog ib qho tseem ceeb hauv kev lag luam semiconductor, uas yog lub luag haujlwm rau kev tsim khoom siv hluav taws xob. Qhov zoo ntawm cov khoom no yog nyob ntawm cov khoom siv hauv paus, uas yog ib txwm ua los ntawm granite. Granite yog ib qho kev xaiv nrov rau lub hom phiaj no vim nws cov kav ntev, siab thermal stability, thiab kev co kuj. Txawm li cas los xij, zoo li txhua yam khoom siv, granite tsis zoo tag nrho, thiab nws tuaj nrog nws qhov tsis xws luag. Hauv tsab xov xwm no, peb yuav tshawb xyuas qhov tsis xws ntawm Wafer Processing Equipment granite puag thiab lawv qhov cuam tshuam rau kev lag luam semiconductor.
Ib qho ntawm cov teeb meem tseem ceeb tshaj plaws ntawm granite hauv paus hauv wafer ua cov cuab yeej yog lawv qhov cuam tshuam rau cov kab nrib pleb thiab fissures. Cov kab nrib pleb no tuaj yeem tshwm sim vim muaj kev ntxhov siab ntau ntawm lub hauv paus thaum lub sijhawm tsim khoom. Thaum cov kev ntxhov siab dhau ntawm granite lub zog, nws tuaj yeem ua rau cov pob txha tawg uas tuaj yeem cuam tshuam rau qhov kawg ntawm cov khoom zoo. Cov teeb meem no tshwj xeeb yog qhov tseem ceeb hauv cov txheej txheem lithography, qhov twg ib qho kev sib txawv ntawm qhov kev sib raug zoo tuaj yeem ua rau wafer tsis muaj txiaj ntsig. Txhawm rau tiv thaiv qhov no, cov tuam txhab lag luam yuav tsum tau nqis peev hauv cov tshuab high-end thiab cov txheej txheem tsim khoom kom txo tau qhov kev pheej hmoo cuam tshuam nrog granite hauv paus tsis xws luag.
Lwm qhov tsis xws luag ntawm granite puag yog nws cov natural inhomogeneity. Granite yog ib yam khoom uas tshwm sim uas tuaj yeem pom qhov txawv ntawm nws cov qauv thiab cov qauv, ua rau nws nyuaj rau kev tswj kom raug. Qhov kev tsis sib haum xeeb no tuaj yeem ua rau muaj kev hloov pauv ntawm cov duab thiab qhov loj ntawm wafer tsim, ua rau muaj teeb meem hauv cov txheej txheem semiconductor fabrication. Cov kev hloov pauv no tuaj yeem cuam tshuam qhov zoo ntawm cov khoom siv hluav taws xob uas tsim tawm thiab thaum kawg cuam tshuam rau qhov kawg ntawm cov khoom lag luam. Txawm li cas los xij, cov tuam txhab lag luam muaj peev xwm txo qis qhov teeb meem no los ntawm kev nrhiav granite los ntawm cov chaw muag khoom muaj npe nrov thiab siv cov cuab yeej ntsuas ntsuas qib siab txhawm rau txheeb xyuas qhov tsis sib xws kom raug.
Lwm qhov kev txwv ntawm granite hauv paus yog lawv qhov hnyav, uas ua rau lawv cumbersome thiab nyuaj txav mus los. Qhov kev txwv no tuaj yeem yog qhov teeb meem rau cov tuam txhab uas xav tau kev txav mus los ntawm lawv cov khoom siv wafer. Qhov hnyav ntawm granite hauv paus kuj tuaj yeem tsim kev sib tw ntxiv rau cov tuam txhab tsim khoom thaum lub sijhawm teeb tsa, tshwj xeeb tshaj yog nyob rau hauv qhov chaw nruj. Txawm li cas los xij, cov tuam ntxhab tau tsim cov kev daws teeb meem los daws qhov teeb meem no, xws li siv cov ntawv me me granite lossis ntxiv cov hauv paus nrog cov qauv kev txhawb nqa ntxiv.
Lwm qhov tsis xws ntawm granite hauv paus hauv wafer ua cov cuab yeej yog lawv cov porosity. Thaum granite yog cov khoom tuab thiab muaj zog, nws tseem muaj qee yam degree ntawm porosity. Cov pores no tuaj yeem ua cov cuab yeej rau cov kab mob xws li tshuaj lom neeg, hlau hais, thiab lwm yam impurities uas tuaj yeem cuam tshuam tsis zoo rau cov txheej txheem tsim khoom wafer. Qhov kev sib tw no tau ua rau kev txhim kho cov txheej txheem tshiab thiab ua tiav uas tuaj yeem txo qhov porosity ntawm granite thiab tiv thaiv kom tsis txhob muaj cov kab mob sib kis.
Hauv kev xaus, thaum lub hauv paus granite hauv cov khoom siv wafer muaj qee qhov kev txwv, lawv tuaj yeem txo cov kev txwv no los ntawm kev siv cov kev tswj kom raug. Nrog txuas ntxiv kev nce qib hauv cov ntaub ntawv tshawb fawb thiab engineering, cov tuam txhab tuaj yeem cia siab tias yuav txuas ntxiv txhim kho qhov zoo thiab qhov tseeb ntawm cov txheej txheem semiconductor fabrication. Raws li qhov kev thov rau cov khoom siv hluav taws xob me me thiab qib siab ntxiv mus ntxiv, cov neeg tsim khoom yuav tsum nrhiav cov kev daws teeb meem tshiab los daws cov kev txwv no thiab tsim cov khoom lag luam zoo dua uas ua tau raws li cov neeg siv khoom xav tau.
qhov tsis xws luag ntawm Wafer Processing Equipment granite puag khoom
