Wafer-kev tshuaj xyuas cov cuab yeej yog qhov tseem ceeb rau kev tswj cov qoob loo hauv kev tsim cov chips. Nws ua cov haujlwm suav nrog kev kuaj pom qhov tsis xws luag, ntsuas qhov ntsuas, ntsuas zaj duab xis-thickness thiab kuaj xyuas cov qauv hauv Circuit Court. Sib nrug los ntawm optical lo ntsiab muag, duab sensors thiab algorithm software, lub hauv paus system txhawb kev txav thiab kho qhov muag units ua raws li qhov tseem ceeb hauv qab lav rau kev soj ntsuam raug. Rau sub-micron lossis txawm nanometer-theem ntsuas qhov yuav tsum tau ua, cov kev txwv nruj yog ua rau lub hauv paus kev co kuj, thermal stability thiab lub sij hawm ntev kev ruaj ntseg. Cov khoom siv niaj hnub xws li cam khwb cia hlau thiab aluminium alloy tsis tuaj yeem ua tiav txoj haujlwm fab kev ua haujlwm, yog li precision granite bases tau siv dav hauv ntau lub tshuab tshuaj xyuas wafer. Kev kos duab ntawm qhov project semiconductor kev paub dhau los, UNPARALLELED Pawg txheeb xyuas qhov sib piv cov laj thawj thiab cov txiaj ntsig zoo ntawm granite hauv paus los ntawm kev xav ntawm cov khoom siv tiag tiag-kab ua haujlwm.
Ntau qhov chaw cuam tshuam muaj nyob hauv wafer-kev tshuaj xyuas qhov chaw tsim khoom. Txawm hais tias chav tsev kub thiab av noo yog tswj tau, cov cua kub tsis tu ncua yog tsim los ntawm cov motors sab hauv thiab cov teeb pom kev zoo, tsim kom muaj qhov kub thiab txias gradients. Kev vibration me ntsis los ntawm kev cob qhia kiv cua, neeg hlau tuav thiab cov cuab yeej nyob ib sab. Lub hauv paus tiv thaiv kev sib hloov ntawm cov loads hauv qab 24-teev kev ua haujlwm tsis nres. Nyob rau hauv cov txheej txheem wafer-kev tshuaj ntsuam xyuas, xws li kev sojntsuam lossis lub lens kho qhov muag nyob ruaj khov thaum lub sijhawm wafer scans ntawm kev kub ceev, lossis theem tseem zoo li qub thiab cov khoom siv kho qhov muag ua rau kev hloov pauv siab. Lub hauv paus me me deformation los yog kev sib kis kev vibration amplified yuav ua rau cov duab tsis meej pem, txoj hauj lwm offset thiab tsis tseeb-positive lossis cuav-tsis zoo tsis xws luag, ncaj qha distorting chip-yield txheeb cais. Yog li ntawd, cov khoom siv hauv paus yuav tsum xa cov khoom siv los tiv thaiv kev cuam tshuam tsis yog qhov hnyav xwb.
Thermal stability yog ib qho tseem ceeb ntawm granite bases rau wafer-kev tshuaj xyuas cov khoom. Thaum tshav kub kub los ntawm lub teeb qhov chaw thiab lub zog motors hloov mus rau lub hauv paus thaum ua haujlwm. Cov hauv paus hlau muaj cov thermal expansion coefficients siab; Thaum tshav kub kub hauv zos ua rau me me kev nthuav dav thiab kev cog lus thiab hloov kho qhov muag platforms. Precision granite nrog ultra-low thermal expansion coefficient zoo suppresses deformation induced los ntawm lub zos tshav kub conduction thiab mitigates tsis zoo cuam tshuam ntawm kub gradient ntawm kho qhov muag tsom thiab qhov chaw. Txawm hais tias muaj qhov kub thiab txias ntawm chav tsev hloov pauv, granite khaws geometric variation tsawg, txo cov khoom siv rov ua dua tshiab thiab lav cov ntaub ntawv ntsuas zoo ib yam thaum lub sij hawm ncua kev soj ntsuam, uas yog ib qho tseem ceeb rau high-volume on-line wafer kuaj.
Superior damping-vibration-txo kev ua tau zoo stabilizes soj ntsuam cov cim. Kev tshuaj xyuas wafer yog qhov ua tau zoo heev rau micro-vibration. Kev co sab nraud ua rau cov duab jitter thiab pseudo-defects. Mineral grain ciam teb nyob rau hauv granite dissipate vibration zog sai thiab txwv kev co kis tau tus mob. Thaum kev kub ceev pib-nres ntawm XY theem thiab cuam tshuam los ntawm wafer tuav robots tshwm sim, granite hauv paus attenuate vibration sai thiab tiv thaiv nws los ntawm propagating rau optical modules. Piv nrog cov hlau hauv paus, granite shortens vibration decay lub sij hawm, enables ceev ruaj khov duab ntawm lo ntsiab muag, txhim kho scanning ceev thiab ntau lawm throughput. Nws qhov kev vibration-damping zoo yog tshwj xeeb tshaj yog nyob rau hauv bright-field / dark-field optical defect tshuaj xyuas thiab high-precision confocal ntsuas.
Ntuj tsis-magnetic khoom adapts rau tshwj xeeb semiconductor-wafer tej yam kev mob. Wafer-kev tshuaj xyuas cov cuab yeej sib xyaw ua ke ntau qhov ntsuas qhov tseeb thiab cov khoom siv kho qhov muag. Qee qhov chaw ua haujlwm hluav taws xob wafers. Ferrous hlau hauv paus zoo li yuav magnetized thiab tsim stray magnetic teb uas cuam tshuam cov teeb liab sensor thiab tej zaum yuav puas micro-circuit lug ntawm wafers. Tsis yog-magnetic granite tshem tawm kev cuam tshuam ntawm kev sib nqus sib nqus thiab muab lub cev huv si rau cov chaw soj ntsuam. Meanwhile, granite nta ruaj khov cov khoom. Kev ntxuav cov kuab tshuaj thiab cov dej noo hauv chav huv yuav tsis corrode substrates los yog tsim cov hmoov av hlau. Nws ua tau raws li cov qauv tswj hwm nruj hauv cov chaw ua haujlwm semiconductor thiab txo qis kev pheej hmoo ntawm wafer paug los ntawm cov khib nyiab poob.
Kev cai qauv thiab txheej txheem tsim rau wafer-kev tshuaj xyuas cov khoom. Granite hauv paus rau wafer-kev tshuaj xyuas cov tshuab tsis yog cov qauv tiaj tus thiab raug kho raws li tag nrho cov tshuab layout. Pre-machined mounting counter-sinks, positioning pin qhov, cable-routing relief slots thiab datum nto haum rau linear-motor theem, optical brackets thiab sensor sib dhos. Txhawm rau ua kom tau raws li cov cai tswj hwm cov khoom siv hluav taws xob, cov chaw ua haujlwm hauv qab tau txais kev kho tshwj xeeb los kaw cov micro-pores, txo cov plua plav paug thiab ua kom yooj yim ntxuav chav. Rau cov qauv nruab nrog cua-kev coj tus kheej theem, kev sib tsoo qib siab yog siv rau granite ua haujlwm qhov chaw kom paub txog cov huab cua ruaj khov thiab kev sib txhuam-dawb du wafer txav. Multi-theem aging yog siv thaum lub sij hawm tsim khoom los tso cov pob zeb sab hauv kev ntxhov siab thiab tsis txhob qeeb qhov me me drift nyob rau hauv lub sij hawm ntev kev loj hlob.
Nws yuav tsum raug sau tseg tias wafer-kev tshuaj xyuas cov cuab yeej teeb tsa cov kev xav tau qib siab rau cov khoom siv granite, thiab marble zoo tib yam tsis tsim nyog kiag li. Qee cov neeg muag khoom tau txais cov pob zeb qib qis nrog qhov kev lees paub thawj zaug, tab sis qhov tseeb maj mam degrades nyob rau hauv tas li thermal cycling thiab kev co hauv cov kab ntau lawm. Tsuas yog qib high-qib dub granite, ua ke nrog nruj kev tshuaj ntsuam xyuas, kev ntxhov siab aging, qhov kub thiab txias precision machining thiab ua tiav kev soj ntsuam metrology, tuaj yeem ua tau raws li cov kev xav tau ntawm cov tshuab semiconductor wafer-kev tshuaj xyuas mus ntev.
Hauv cov ntsiab lus, rau cov khoom siv semiconductor xws li wafer defect nrhiav kom tau thiab qhov ntev metrology, precision granite bases yog ntau tshaj qhov yooj yim load-bearing qhov chaw; lawv ua qhov raug teeb meem ntawm tag nrho cov kev tshuaj ntsuam xyuas. Tau txais txiaj ntsig los ntawm kev nthuav dav thermal tsawg, siab vibration damping, non-magnetism thiab tsis tshua muaj particle tso, granite bases txo qhov cuam tshuam los ntawm qhov kub thiab txias, kev vibration thiab magnetic teb. Lawv ruaj khov kho qhov muag pom kev thiab kev txav chaw, txo qis qhov ntsuas tsis tseeb thiab txhawb kev soj ntsuam zoo thiab txhim khu kev qha wafer hauv cov kab ntau lawm semiconductor.