Semiconductor kev tsim khoom thiab tshuaj xyuas cov khoom siv nruj heev rau kev siv cov lus tsa suab. Raws li cov tub ntxhais txav cov cab kuj txhawb nqa cov kab hluav taws xob, kev tawm tswv yim kho qhov muag thiab cov lus pom tseeb, cov kab teeb pom kev ruaj khov, kev nruj nruj, kev huv thiab qhov tseeb geometric ncaj qha cuam tshuam cov txiaj ntsig hauv kev tshuaj xyuas wafer, micro-nano machining thiab lithography auxiliary txheej txheem. Cov khoom siv semiconductor npog ntau hom. Los ntawm wafer pom kev tshuaj xyuas, sojntsuam chaw nres tsheb thiab laser micro-machining rau optical metrology cov cuab yeej, mus txawv tebchaws layout, acceleration thiab huv chamber qhov chaw txawv heev. Cov kab hluav taws xob tsis tuaj yeem tsis sib xws rau cov qauv tsim tshwj xeeb thiab kev sib dhos ntawm cov khoom siv ib leeg. Nrog xyoo dhau los hauv R&D thiab kev tsim khoom ntawm ultra-precision granite Cheebtsam, UNPARALLELED Group muab tag nrho - voj voog kev cai granite beam kev pabcuam rau kev lag luam semiconductor. Nws muab kev cai pob zeb kab teeb yoog raws li kev ua haujlwm tshwj xeeb ntawm cov khoom siv semiconductor, npog cov qauv simulation, xaiv cov khoom siv pob zeb, precision machining thiab huv si sib dhos adaptation.
1. Ua ntej- project simulation: Multi-physics qauv tsim raws li tshwj xeeb semiconductor ua hauj lwm tej yam kev mob
Cov cuab yeej semiconductor txawv ntawm cov cuab yeej siv tshuab gantry. Ntau qhov chaw muaj qhov sib txig sib luag, thiab cov kab teeb yuav tsum sib npaug lub teeb yuag thiab siab nruj thaum khaws qhov chaw rau lub tshuab nqus tsev, cov xov hluav taws xob thiab cov ntsiab lus sensor mounting. Cov kab teeb txheem tsis tuaj yeem ua tiav tag nrho cov kev xav tau ntawm kev sib koom ua ke. Nyob rau hauv thawj theem ntawm kev cai tej yaam num, UNPARALLELED ua multi-physics simulation raws li mechanical drawings, motion parameters, heat distribution and clean chamber environment. Ntawm ib sab, nws simulates alternating inertial loads generated thaum lub sij hawm siab -ceev reciprocation ntawm slides los kwv yees dynamic deflection ntawm kab teeb thiab optimize ntoo khaub lig- seem thiab kab noj hniav layout, txhim kho khoov thiab torsional kuj thaum tswj tus kheej - nyhav. Ntawm qhov tod tes, thermal simulation ntsuas qhov ntsuas kub hauv cheeb tsam uas tau tshwm sim los ntawm kev tsim hluav taws xob tas mus li los ntawm cov motors thiab cov khoom siv kho qhov muag kom tsis txhob muaj kev siv drift ntawm linear scale. Lub caij no, nws npaj kev zam kev tsis sib haum xeeb, routing qhov thiab embedded sensor txoj hauj lwm raws li spatial txwv nyob rau hauv cov khoom chambers los tiv thaiv txhua yam cuam tshuam nyob rau hauv cov theem tom ntej. Rau loj- cov cuab yeej tshuaj xyuas hom, UNPARALLELED tseem ntsuas cov monolithic thiab precision- sib dhos cov qauv kev xaiv, sib piv kev huv thiab ntev- lub sij hawm ruaj khov kom pom zoo cov qauv zoo tshaj plaws rau tus neeg siv lub tshuab qauv.
2. High-purity granite raw khoom xaiv: Ua tau raws li cov kev cai ntawm cov khoom siv hluav taws xob tsawg thiab kev ruaj ntseg siab
Sab hauv ntawm cov khoom siv semiconductor yog ib puag ncig huv. Cov ntaub ntawv tseem ceeb yuav tsum tswj cov plua plav tiam thiab tsis tshua muaj cov organic compound tso tawm kom tsis txhob muaj kab mob wafers thiab cov khoom siv kho qhov muag. Ordinary pob zeb tej zaum yuav muaj cov ntxhia pob zeb xoob thiab yooj yim tshem cov hmoov tom qab machining, ua rau nws tsis haum rau cov chav huv huv. Targeting semiconductor daim ntaub ntawv, UNPARALLELED xaiv siab -purity ntom ntom dub granite, nruj me ntsis tswj cov microcracks sab hauv thiab xoob cov ntxhia hauv cov khoom siv los txo cov particle shedding. Tom qab cov pob zeb nyoos tuaj txog ntawm lub Hoobkas, ntxiv rau cov qauv kev ntsuas kev ntsuas, kev kuaj xyuas kev huv yog ua los xyuas kom meej cov pob zeb zoo nkauj thiab ruaj khov thermal expansion coefficient. Nws tsim nyog zam kev deformation hauv zos los ntawm cov khoom siv tsis sib xws thiab txo cov plua plav tawm kom haum rau Chav Kawm 1000 lossis siab dua huv chav ntawm cov khoom siv semiconductor. Rau cov qauv uas yuav tsum tau ua los tiv thaiv - zoo li qub, kev kho qhov chaw tshwj xeeb tuaj yeem sib phim thaum lub tshuab ua kom tau raws li qhov xav tau los tiv thaiv - zoo li qub ntawm cov cuab yeej semiconductor.
3. Ultra- precision machining thiab embedded customization: Adapt rau precision module sib dhos ntawm semiconductor khoom
Semiconductor beams are densely populated with mounting holes for fixing linear motors, linear scales, optical bases and limit sensors. Txoj hauj lwm, qhov tob, perpendicularity thiab xov siv ntawm txhua qhov xav tau ultra-siab precision. Txhua qhov kev sib txawv ntawm qhov chaw yuav qhia txog kev ntxhov siab los ua ke thiab zais deformation thaum lub sijhawm teeb tsa module. UNPARALLELED tsim kev cai kos lub tes tsho raws li tus neeg siv khoom BOM kos duab. Cov tes tsho sib txawv thiab cov tshuab sib txuas tshwj xeeb raug xaiv rau cov cheeb tsam hauv qab sib txawv load. The layout of all holes is verified by stress simulation to avoid stress concentration caused by densely arranged holes and prevent local stone deformation when bolts are tightened. Kev siv cov kab hluav taws xob yog nano-lapped nyob rau hauv qhov tsis tu ncua-kub vibration- cais rhiav kom nruj tswj kev ncaj, sib luag thiab flatness. Tsis zoo li cov cuab yeej siv tshuab zoo tib yam, cov npoo ntawm cov kab hluav taws xob semiconductor yog passivated los txo cov seem seem. Tom qab machining, txheej txheem ntxuav tshwj xeeb tshem tawm cov plua plav thiab cov khoom seem. Geometric tolerances ntawm cov khoom tiav yog tswj rau qib metrology rau cov khoom siv semiconductor, kom ntseeg tau tias txuas ntxiv thiab ruaj khov mounting siv rau kev taw qhia rails thiab linear scales thiab txo qis commissioning workload thaum lub sij hawm tag nrho lub tshuab sib dhos.
4. Cov txheej txheem huv thiab kev tshuaj xyuas lub Hoobkas: Ua tau raws li cov qauv xa khoom semiconductor
Kev xa khoom ntawm cov khoom siv semiconductor txawv ntawm cov khoom siv tshuab zoo tib yam. Dhau li ntawm geometric precision tshuaj xyuas, kev tswj kom huv thiab cov ntaub ntawv ntsuas ntsuas ntsuas yuav tsum tau ua. Tom qab ua tiav, kev cai granite kab teeb los ntawm UNPARALLELED mus los ntawm ntau cov txheej txheem tu. Qhov kawg qhov ntev re- ntsuas tau ua tiav ntawm nws tus kheej ntawm cov chaw ua haujlwm huv. Tag nrho cov cuab yeej tshuaj xyuas yog ntsuas nrog CNAS traceability. Daim ntawv qhia tag nrho yog muab, nrog rau kev ncaj, flatness, loaded deformation cov ntaub ntawv thiab cov ntaub ntawv saib xyuas huv huv rau tus neeg siv tag nrho - tshuab kuaj xyuas. Rau cov kab sib dhos uas tau txais nyob rau hauv ntev -travel semiconductor tshuaj xyuas cov khoom, kev sib txuas kuj tseem ua tiav nyob rau hauv qhov kub thiab txias. Tsawg-shrinkage, qis- cov nplaum nplaum raug xaiv. Tom qab kho, lub nqaj yog lapped integrally dua. Kev ruaj ntseg ntawm cov chaw sib txuas tau raug tshuaj xyuas emphatically kom lav tsis muaj cov khoom tsis haum tshuaj yuav kis mus rau lub chamber. Plua plav-dawb ntim khoom tau txais kev xa khoom los tiv thaiv kev ua qias tuaj tom ntej thaum thauj.
5. Ntev -lub sij hawm ruaj ntseg lav: Hloov mus rau lub sijhawm ua haujlwm ntev ntawm cov khoom siv semiconductor
Cov khoom siv hluav taws xob semiconductor ua haujlwm tsis tu ncua txhua xyoo - puag ncig. Qhov ntsuas kub me me tseem nyob hauv cov tshuab, thiab cov slides reciprocate ntawm cov zaus. Beams yuav tsum tswj xyuas qhov tseeb geometric rau xyoo lossis ntau tshaj kaum xyoo. Hlau beams zoo li deform vim maj mam tso tawm ntawm residual stress. Hauv kev sib piv, kev cai granite kab teeb tsis muaj kev ntxhov siab hauv cov khoom siv raw. Tom qab txiav thiab drilling, lawv tau ntev ntev - lub sij hawm tas li - kub aging kom tso tawm machining tag nrho - induced residual stress. Geometric precision decays qeeb heev hauv kev pab cuam, txo cov khoom siv downtime rau disassembly thiab calibration thiab ua kom ruaj khov cov kab ntau lawm. UNPARALLELED tau muab kev cai granite kab teeb rau ntau cov khoom siv semiconductor tuam ntxhab thiab cov chaw soj ntsuam kho qhov muag. Cov khoom yog siv rau hauv wafer nto tshuaj xyuas, kho qhov muag metrology, laser trimming thiab sojntsuam platforms. Kev npaj xa tuaj tuaj yeem hloov kho raws li tus qauv R&D, me me -batch sim ntau lawm thiab theem ntau lawm.
Xaus
Kev cai granite beams rau cov khoom siv semiconductor tsis yog tsuas yog cov pob zeb ua tiav raws li cov duab kos. Tag nrho cov kev cai engineering suav nrog kev xaiv cov khoom siv, ntau- physics simulation, kev txhim kho cov qauv, precision embedding thiab huv machining, tailored rau semiconductor cov khoom tshwj xeeb uas yuav tsum muaj xws li ib puag ncig huv si, micro-nano precision thiab ntev- lub sij hawm ruaj khov. Nrog ua tiav kev tsim muaj peev xwm rau ultra-precision granite Cheebtsam, UNPARALLELED Pab pawg sib sib zog nqus nrog R&D thiab kev xav tau ntau ntawm cov khoom siv semiconductor, muab siab -kev ua haujlwm kev cai granite beams rau ntau yam wafer tshuaj xyuas, kho qhov muag metrology thiab micro-nano machining cov cuab yeej thiab txhawb kev ruaj ntseg ntawm cov khoom siv semiconductor{8}.