Semiconductor soj ntsuam chaw ua hauj lwm yog heev rhiab heev rau magnetic cuam tshuam thiab nruab nrab corrosion. Kev cuam tshuam me me sib nqus los yog cov khib nyiab xeb tuaj yeem ua rau wafer positioning deviations thiab optical lens contamination, ncaj qha txo qis nti tshuaj xyuas cov txiaj ntsig. Ib txwm hlau hauv paus muaj qhov tsis zoo rau cov ntawv thov no. Los ntawm qhov sib txawv, cov khoom siv granite siv cov khoom siv hauv lub cev thiab tshuaj lom neeg ntawm kev ua tsis yog -sib nqus thiab xeb-dawb kom ua tau raws li kev ua haujlwm nruj ntawm cov semiconductor cleanrooms, ua rau lawv nyiam cov khoom siv rau kev soj ntsuam wafer, kuaj pom thiab cov khoom siv metrology precision.
Cov chaw soj ntsuam semiconductor tau dav nruab nrog cov motors linear, grating sensors thiab electromagnetic drive modules. Hlau puag xws li hlau thiab cam khwb cia hlau yog magnetically conductive. Thaum lub cev muaj zog ua haujlwm, sib nqus hysteresis thiab stray magnetic teb yuav tshwm sim. Cov hlau nplaum tsis muaj zog tuaj yeem cuam tshuam kev nyeem ntawv thiab txawm cuam tshuam nrog microcircuits thiab micro- cov khoom ntawm wafers, uas ua rau muaj kev sib tw. Granite yog ib qho ntxhia pob zeb sib sau ua ke yam tsis muaj hlau nplaum lossis qib sib nqus, tag nrho tsis yog-sib nqus. Nws yuav tsis ua rau cov hlau nplaum ntxiv thaum lub cev muaj zog khiav tsis tu ncua, tshem tawm qhov kev ntsuas qhov yuam kev tshwm sim los ntawm kev cuam tshuam ntawm cov hlau nplaum thiab ua kom muaj qhov sib npaug micron - qib qhov chaw.
Coolant emulsions, ntxuav cov kuab tshuaj thiab cov huab cua ntub feem ntau muaj nyob hauv chav huv. Hlau Cheebtsam yuav raug kev txom nyem electrochemical corrosion tom qab ntev raug rau cov xov xwm thiab tsim xeb hmoov. Thaum muaj huab cua, cov kab xeb tau nkag mus rau qhov chaw wafer, qhov muag qhov muag thiab qhov ntsuas qhov ntsuas, ua rau muaj kab mob wafers thiab tsim cov khoom tsis zoo. Granite tsis muaj tshuaj lom neeg rau oxidation thiab xeb. Txawm tias ntev npaum li cas - raug rau cov dej txias los yog cov av noo tas li hauv chav huv, nws tsis muaj qhov xeb lossis hmoov av hlau. Nws txaus siab rau cov particle- tswj cov kev xav tau hauv kev cob qhia huv thiab txo cov kev pheej hmoo zoo vim yog kev sib kis.
Tshaj li tsis yog -sib nqus thiab xeb- cov txiaj ntsig pub dawb, cov khoom siv tshuaj ntsuam xyuas cov khoom siv hluav taws xob tau tsim cov kev cai nruj ntawm thermal stability thiab kev co damping ntawm cov hauv paus. Kev tshuaj xyuas Chip feem ntau xav tau kev ntsuas txuas mus ntev, thaum qhov ntsuas kub me ntsis tshwm sim hauv kev cob qhia. Granite lub ultra- qis thermal expansion coefficient suppresses benchmark deformation tshwm sim los ntawm qhov kub thiab txias. Lub caij no, nws qhov zoo tshaj plaws damping absorbs vibration generated thaum lub sij hawm siab -ceev linear motor txav, tiv thaiv kev co hloov mus rau kev soj ntsuam xyuas thiab stabilizing kho qhov muag duab thiab ntsuas qhov ntev.
Cov khoom siv semiconductor tuaj nyob rau hauv ntau yam kev teeb tsa. Granite Cheebtsam tuaj yeem ua kev cai -fabricated raws li cov khoom siv kos duab. Embedded T-slots, huab cua- bearing interfaces thiab siv dav hlau rau sensor mounting muaj los ua kom tau raws li cov qauv kev xav tau ntawm gantry soj ntsuam platforms, XY motion theem thiab wafer carrier bases. Tom qab machining, granite qhov chaw mus ntev -lub sij hawm kev ntxhov siab-relief aging, micro-pore sealing thiab precision metrology soj ntsuam. Geometric kam rau ua tau raug txheeb xyuas qhov tsis tu ncua -kub, vibration- cais chav ntsuas ntsuas kom lav qhov ntsuas qhov tseeb thaum xa khoom thiab tiv thaiv deformation thaum lub sijhawm ua haujlwm ntev -.
Ntau cov khoom siv semiconductor manufacturers txhawj xeeb txog kev saib xyuas haujlwm hauv chav huv. Cov hauv paus hlau yuav tsum tau tshem tawm cov xeb tsis tu ncua thiab txheej txheej rov ua dua tshiab, thiab kev saib xyuas zoo li no yooj yim tsim cov plua plav uas cuam tshuam kev faib chav huv. Granite Cheebtsam yuav tsum tsis muaj ib ntus los tiv thaiv- kev kho corrosion. Kev saib xyuas txhua hnub tsuas yog siv rau qhov chaw so thiab tshem tawm cov plua plav me me nrog cov plua plav-dawb ntaub thiab cov tshuaj ntxuav tu tshwj xeeb. Cov kev saib xyuas yooj yim ua haujlwm khaws cia cov chav huv huv thiab txo cov nqi qis.
Sib nqus cuam tshuam, kev sib kis kab mob thiab cov qauv ntsuas deformation yog qhov kev pheej hmoo tseem ceeb rau kev tswj hwm hauv kev siv cov khoom siv hluav taws xob metrology suav nrog wafer AOI kev soj ntsuam pom, kev cuam tshuam thiab tom qab- kev tshuaj ntsuam xyuas. UNPARALLELED granite structural Cheebtsam ua ke tsis yog- sib nqus, xeb-dawb, qis-deformation thiab vibration-damping nta kom haum rau qhov tshwj xeeb kev khiav hauj lwm ntawm semiconductor cleanrooms. Lawv xa cov khoom ruaj khov, huv si thiab tsis yog -magnetic benchmark kev txhawb nqa rau ntau yam khoom siv tshuaj ntsuam xyuas semiconductor thiab pab kom ua tiav cov haujlwm ruaj khov thiab ua haujlwm tau zoo.