Wafer Processing Equipment yog cov cuab yeej tseem ceeb rau cov tuam txhab semiconductor. Ntau lub tuam txhab feem ntau siv lub txaj granite hauv lawv cov khoom ua haujlwm Wafer. Lub txaj granite yog ib qho tseem ceeb ntawm lub tshuab, tab sis feem ntau nws tuaj yeem raug puas tsuaj vim kev siv hnyav lossis siv tsis raug ntawm cov khoom siv. Kev kho cov tsos ntawm lub txaj granite puas yog qhov tseem ceeb vim nws cuam tshuam rau qhov tseeb ntawm cov khoom siv. Nov yog cov kauj ruam ntawm yuav ua li cas kho cov tsos ntawm cov khoom ua haujlwm Wafer puas tsuaj granite txaj thiab recalibrate qhov raug:
Kauj Ruam 1: Tshawb xyuas lub txaj Granite
Ua ntej pib kho, nws yog ib qho tseem ceeb uas yuav tau kuaj xyuas lub txaj granite kom puas. Xyuas seb puas muaj cov kab nrib pleb pom, chips, lossis khawb ntawm qhov chaw. Siv lub teeb nyem los xyuas cov grooves thiab cov pob qij txha ntawm cov granite. Yog tias pom muaj kev puas tsuaj, ua ib qho kev xav ntawm nws qhov chaw thiab qhov hnyav.
Kauj Ruam 2: Ntxuav Qhov Nto
Siv lub tshuab ntxhua khaub ncaws uas tsis yog abrasive thiab ib daim ntaub mos los ntxuav lub txaj ntawm granite. Nco ntsoov tshem tawm cov av, plua plav, lossis khib nyiab. Yog tias muaj cov roj stains, siv cov tshuaj degreaser lossis cov roj tshem tawm. Thaum lub npoo yog ntxuav, qhuav nws nrog ib daim ntaub mos.
Kauj Ruam 3: Tshem tawm cov nplaum nplaum
Yog hais tias lub granite nto muaj me ntsis khawb los yog blemishes, siv ib tug granite polishing compound kom tshem tawm lawv. Siv cov khoom sib xyaw ua ke hauv ib lub voj voog uas siv cov ntaub npuag los yog cov ntaub ntawv uas tsis yog abrasive. Tom qab polishing, ntxuav lub saum npoo dua.
Kauj Ruam 4: Kho Chips thiab Cracks
Rau cov chips thiab tawg, siv epoxy granite muab tub lim. Ntxuav qhov chaw puas thiab qhuav nrog ib daim ntaub mos muag. Ua raws li cov lus qhia ntawm cov khoom siv muab tub lim thiab sib tov ob feem ntawm epoxy resin kom huv si. Siv cov muab tub lim rau hauv qhov chaw tawg lossis tawg thiab cia nws qhuav rau tsawg kawg ib teev. Thaum qhuav, siv cov ntawv nplua-grit sandpaper rau xuab zeb kom txog thaum nws ntws nrog cov seem ntawm granite nto.
Kauj Ruam 5: Recalibrate cov cuab yeej
Tom qab kho lub txaj granite, nws yog ib qho tseem ceeb rau calibrate cov cuab yeej. Nrog rau cov chaw tsim khoom cov lus qhia rau recalibration. Yog tias cov cuab yeej siv los ntsuas qhov tseeb, siv lub laser interferometer los xyuas nws qhov tseeb. Xyuas kom tseeb tias txhua axis raug kho kom raug thiab lub zog yog du.
Hauv kev xaus, kev kho cov tsos ntawm cov khoom siv ua haujlwm Wafer puas tsuaj yog tsim nyog los xyuas kom meej tias nws ua haujlwm raug thiab raug. Kev tu thiab kho tsis tu ncua tuaj yeem pab ua kom lub neej ntev ntawm cov khoom siv thiab txo qis sijhawm. Los ntawm ua raws li cov kauj ruam saum toj no, nws yog ib qho yooj yim los kho cov tsos ntawm lub txaj granite puas thiab recalibrate cov cuab yeej raug.
