Hauv kev lag luam semiconductor fabrication, cov cuab yeej ua tau zoo yog qhov kawg dictated los ntawm mechanical stability. Raws li lithography, wafer tshuaj ntsuam xyuas, thiab cov tshuab metrology thawb mus rau nanometer- teev qhov chaw, cov khoom siv hlau feem ntau qhia txog micro- sib txawv uas sib xyaw ua rau poob tawm. Granite cua bearings tau tshwm sim los ua ib qho kev daws teeb meem tseem ceeb rau qhov kev sib tw no, muab lub hauv paus tsim nyog rau ultra-kev tswj cov lus tsa suab.
Lub ntsiab kom zoo dua ntawm granite nyob rau hauv cov huab cua bearing daim ntaub ntawv yog nws exceptional thermal stability. Semiconductor manufacturing ib puag ncig ua haujlwm nyob rau hauv kev tswj qhov kub thiab txias, tab sis lub tshav kub hauv cheeb tsam los ntawm siab - ceev motors thiab linear drives yog inevitable. Granite muaj cov thermal expansion coefficient ntawm kwv yees li 0.6-1.2 × 10⁻⁶ / degree, kwv yees li ib -feem kaum ntawm cov hlau. Qhov qis coefficient no ua kom ntseeg tau tias cov qauv siv geometric tseem nyob tas li txawm tias nyob rau hauv cov thermal loads dynamic. Thaum lub sij hawm huab cua ua haujlwm ntawm lub hauv paus granite, qhov sib txawv ntawm huab cua nyob twj ywm tsis sib xws, tiv thaiv lub suab thiab yaw yuam kev uas yuav txwv tsis pub degrade positioning repeatability.
Kev vibration damping sawv cev rau qhov tseem ceeb thib ob. High-kev ceev automation thiab ceev axis txav ua kom siab -ntau zaus tshuab suab nrov. Granite lub ntuj sab hauv damping muaj peev xwm ntau dua li cam khwb cia hlau los yog welded steel qauv. Cov cuab yeej tam sim no absorbs micro- vibrations ua ntej lawv tuaj yeem nthuav tawm hauv lub cev. Raucua bearing theem, qhov no txhais tau hais tias cov cua compressible zaj duab xis ua haujlwm nyob rau hauv ib qho chaw nyob ntsiag to. Qhov tshwm sim yog smoother cov lus tsa suab thiab txo cov sij hawm daws teeb meem, uas ncaj qha txhais mus rau ntau dua throughput hauv wafer tuav thiab soj ntsuam cov txheej txheem.
Material density and structural homogeneity are equally important for air bearing performance. Cov yeeb yaj kiab cua hauv qhov kev coj ua tau zoo feem ntau ua haujlwm ntawm qhov khoob ntawm 10 txog 20 micrometers. Txhua qhov kev hloov pauv hauv qhov chaw tiaj tus ntawm cov kabmob khiav ncaj qha cuam tshuam rau lub peev xwm thauj khoom thiab nruj. High- granite ntom ntom, tshwj xeeb tshaj yog qib siab tshaj 3000 kg / m³, muab cov qauv tsim nyog rigidity kom muaj kev sib haum xeeb nyob rau hauv 1-2 μm / m² tshaj qhov loj. Cov ntaub ntawv tsawg dua los yog cov khoom siv marble tsis tuaj yeem txhawb nqa cov kev kam rau siab hauv kev thauj khoom, ua rau hnav ntxov ntxov thiab poob ntawm qhov tseeb.
Manufacturing granite pa bearing Cheebtsam yuav tsum tau tshwj xeeb cov txheej txheem uas mus tshaj li cov pa zeb fabrication. Ua kom tiav qhov yuav tsum tau ua kom tiav (Ra Tsawg dua lossis sib npaug ntawm 0.2 μm) thiab qhov tseeb geometric xav tau kev sib tsoo thiab tes lapping. Cov txheej txheem lapping tshem tawm cov ntsiab lus siab ntawm microscopic los tsim kom muaj qhov nruam, tsis sib xws. Cov kauj ruam no yog qhov tseem ceeb vim tias huab cua bearings cia siab rau qhov zoo ib yam geometry los tsim kom muaj kev ruaj khov siab. Automated CNC machining ib leeg tsis tuaj yeem ua tiav qhov kev ncaj ncees ntawm qhov kawg uas xav tau rau nano- positioning; kev ua tiav ntawm tes tseem yog qhov tseem ceeb rau kev tshem tawm sub-micron daim ntawv yuam kev.
Kev txheeb xyuas qhov zoo hauv lub npe no yog nyob ntawm kev ntsuas ntsuas tau. Reputable manufacturers ntiav laser interferometry thiab hluav taws xob theem sib txawv tsom xam kom validate flatness thiab parallelism. Cov kev ntsuas no yuav tsum tau ua nyob rau hauv ib puag ncig tswj chaw soj ntsuam kom tshem tawm cov thermal gradients thaum kuaj. Yog tias tsis muaj kev nruj tsis yog- kev sim ua kom puas tsuaj thiab kev tshawb xyuas qhov loj me, cov khoom siv sab hauv tsis xws luag lossis cov kev ntxhov siab seem tuaj yeem cuam tshuam ntev - lub sijhawm ruaj khov. Kev sib koom ua ke ntawm cov qauv kev kam rau siab thoob ntiaj teb, xws li ISO 2768 thiab DIN 876, xyuas kom meej tias cov khoom siv granite sib txuas ua ke rau hauv cov khoom sib txuas ua ke.
Cleanroom compatibility ntxiv solidifies granite txoj hauj lwm nyob rau hauv semiconductor manufacturing. Tsis zoo li coated hlau uas yuav degrade los yog outgas, ntuj granite yog chemically inert thiab tsis yog - ntxeem tau. Nws tsis oxidize lossis tso cov khoom, ua rau nws haum rau ISO Class 1-3 ib puag ncig. Qhov kev ruaj ntseg ntawm cov khoom no txo cov kev pheej hmoo ntawm kev kis kab mob thiab ncua sij hawm txij nkawm, hais txog kev tiv thaiv kev tiv thaiv thiab kev txhawj xeeb txog kev ua haujlwm.
Kev siv lub tswv yim ntawm granite pa bearings txuas ntxiv hla ntau yam txheej txheem semiconductor. Wafer tshuaj xyuas tshuab siv cov hauv paus granite los tswj kev kho qhov muag ntawm qhov txuas txuas ntxiv. Cov theem lithography nyob ntawm seb granite qhov ntev li cas los khaws qhov tseeb overlay. Txawm hais tias nyob rau hauv cov khoom ntim siab heev, qhov chaw tso siab rau qhov nruj, cov qauv granite muab cov cuab yeej siv tsim nyog rau kev sib koom ua ke txhim khu kev qha.
Rau cov neeg yuav khoom engineering thiab cov thawj tswj xyuas kev soj ntsuam xyuas cov kev daws teeb meem ntawm cov huab cua granite, qhov ua kom pom tseeb yuav tsum txuas ntxiv mus rau qhov chaw tshwj xeeb. Cov ntaub ntawv pov thawj, kev tswj cov txheej txheem tsim khoom, thiab kev ntsuas kev ntsuas kev ntsuas yog qhov ntsuas qhov tseeb ntawm kev ntseeg tau. Cov neeg muag khoom uas tswj hwm cov txheej txheem zoo thiab nqis peev hauv kev ntsuas kev ntsuas siab ua kom pom tau tias muaj kev cog lus rau qhov kev xav tau ntawm kev tsim khoom semiconductor. Lub hauv paus txheej txheem tsis yog ib qho kev txhawb nqa xwb; nws yog ib tug active contributor rau system raug. Kev nkag siab txog cov ntaub ntawv tshawb fawb thiab kev tsim kev qhuab qhia tom qab granite pa bearings ua rau muaj kev paub ntau ntxiv txog kev txiav txim siab thiab kev ua haujlwm ntev ntev - cov khoom siv.