Tag Nrho -Nto Flatness yuam kev Calibration Standard Txheej txheem rau Laser Interferometer Ntiaj teb no nrhiav tau ntawm loj Granite Cheebtsam

1. Kev Lag Luam Mob Cov Ntsiab Lus hauv Kev Tshuaj Xyuas Cov Khoom Siv Loj Granite: Cov Txheej Txheem Txheej Txheem Ua Tsis Txaus Siab -Qhov yuav tsum tau ua Precision
Loj granite Cheebtsam (ntev Ntau dua los yog sib npaug li 3 m, dav Ntau dua lossis sib npaug li 1.5 m) xav tau ultra- nruj flatness tswj nyob rau hauv 0.005 mm / m, ua tag nrho - nto flatness tshuaj xyuas ib tug ntev kev lag luam kev sib tw. Traditional soj ntsuam mus kom ze raug peb lub ntsiab drawbacks:
Ua ntej, segmented soj ntsuam tsim cov qhov muag tsis pom kev thiab cov ntaub ntawv loj splicing yuam kev. Cov pa sib cuag- hom cuab yeej xws li qib hluav taws xob thiab ntsuas ntsuas ntsuas cov khoom loj hauv ntu los ntawm ntu, nrog cov ntaub ntawv manually stitched ua ke. Cov txheej txheem no tsis tshua muaj - ua haujlwm tau zoo thiab ua rau cov ntaub ntawv tsis txuas ntxiv ntawm ntu ntu; tag nrho qhov yuam kev tom qab splicing tuaj yeem tshaj 0.01 mm, ua tsis tau raws cov qauv rau siab -end khoom. Tsis tas li ntawd, kev ntsuas kev sib cuag khawb polished granite nto thiab ua rau kev puas tsuaj mus tas li.
Qhov thib ob, tsis txaus ib puag ncig tiv thaiv cuam tshuam cov ntaub ntawv tshuaj xyuas. Laser interferometers tsis tshua muaj siab rau qhov kub thiab txias hloov pauv, kev vibration thiab airflow. Feem ntau ntawm - chaw cob qhia tsis muaj lub hom phiaj kev tswj hwm ib puag ncig thaum lub sij hawm loj - kev ntsuam xyuas cov khoom. Thermal expansion thiab contraction hloov granite geometry; huab cua turbulence destabilizes laser optical paths; vibration ua rau cov ntaub ntawv tsis tu ncua. Cov txiaj ntsig kev nyeem ntawv sib txawv heev los ntawm qhov tseeb flatness thiab tsis tuaj yeem ua raws li cov ntaub ntawv calibration siv tau.
Thib peb, cov txheej txheem calibration uas tsis muaj kev ntsuas tsis muaj kev kho qhov yuam kev tsis sib xws. Ntau lub tuam txhab ua kev sib tsoo thiab kev kho kom haum raws li kev paub dhau los tom qab kuaj pom qhov sib txawv ntawm qhov sib txawv, ua rau dhau - kho lossis tshem tawm cov khoom tsis txaus. Yog tias tsis muaj qhov thib ob puv - cheeb tsam re- kev tshuaj xyuas tom qab -calibration, flatness tsis tuaj yeem txheeb xyuas tau. Thaum muab tso rau hauv kev pabcuam, cov khoom siv no ua rau muaj kev puas tsuaj ntawm cov khoom siv thiab kev ntsuas qhov tseeb, ua rau lub sijhawm ntev - cov nqi tu.
Tsis tas li ntawd, kev lag luam tsis muaj kev sib koom ua haujlwm tshwj xeeb rau laser interferometer tshuaj xyuas ntawm granite loj. Disparate xeem workflows thiab cov ntaub ntawv ua cov logic thoob manufacturers muab kev ntsuas ntsuas incomparable, tuav rov qab tag nrho precision tswj muaj peev xwm ntawm lub sector.
2. Txuj kev soj ntsuam thoob ntiaj teb ua haujlwm rau Laser Interferometers kom ua tiav qhov muag tsis pom kev
Txhawm rau daws qhov tsis txaus ntseeg hauv cov qauv kev sim, UNPARALLELED® tsim cov txheej txheem kev soj ntsuam thoob ntiaj teb ua haujlwm rau cov khoom loj granite tom qab cov txheej txheem tseem ceeb: ib puag ncig preconditioning → ntsuas ntsuas → puv - thaj tsam daim phiaj scanning → cov ntaub ntawv ua → kev soj ntsuam yuam kev. Txhua kauj ruam yog standardized los lav qhov tseeb, traceable ntsuas cov ntaub ntawv. Cov txheej txheem ntxaws ntxaws tau piav qhia hauv qab no:
(1) Ua ntej-Kev soj ntsuam ib puag ncig ua ntej kom tso ib lub hauv paus rau kev kuaj qhov tseeb
Kev nthuav dav ntawm - thaj chaw tswj hwm ib puag ncig tshem tawm kev cuam tshuam sab nraud ua ntej ntsuas:
Khaws qhov ntsuas kub ntawm 20℃± 0.5℃thiab txheeb ze av noo 45% -60% ntawm qhov kub thiab txias tsis tu ncua los tiv thaiv thermal deformation ntawm granite.
Teeb tsa kev tiv thaiv- kev sib cais kev sib cais nyob ib puag ncig thaj chaw soj ntsuam nrog kev vibration- damping mats thiab suab- nqus paj rwb los thaiv kev cuam tshuam los ntawm lub khw muag khoom thiab cov neeg taug kev txav, txwv kev vibration tshaj tawm tsawg dua lossis sib npaug li 0.005 mm / s thoob plaws hauv kev sim.
Ua tib zoo so cov plua plav thiab cov roj tawm ntawm qhov chaw ua haujlwm thiab lub rooj zaum sim nrog lint- cov ntaub dawb thiab cov tshuaj ntxuav tu siab, tsis txhob cuam tshuam cov kab hluav taws xob laser thiab cov ntawv nyeem tsis zoo uas tshwm sim los ntawm cov khoom paug.
Cia cov khoom nyob ruaj ruaj rau 24 teev kom sib npaug ntawm cov khoom ua haujlwm thiab qhov kub thiab txias, tshem tawm qhov kev tsis sib haum xeeb uas tshwm sim los ntawm kev ntxhov siab sab hauv.
(2) Test Instrument Calibration rau Stable Optical Paths thiab Matching Parameters
Siab -precision laser interferometers (kev daws teeb meem Ntau dua lossis sib npaug ntawm 0.001 μm) ua ke nrog cov khoom siv kho qhov muag txuas ntxiv npog tag nrho cov hneev taw ntawm cov haujlwm loj granite:
Mount lub interferometer transmitter thiab receiver rau ntawm nplooj siab brackets ntawm opposite xaus ntawm lub tivthaiv, kho bracket qhov siab thiab levelness kom dlhos lub laser beam parallel rau lub ntsuas nto.
Ua kom ua tau -nyob rau hauv kev kho qhov muag kho qhov ua haujlwm niaj hnub kom kho lub teeb beam perpendicularity thiab parallelism, kom ntseeg tau tias ntse, ruaj khov cuam tshuam fringes tsis muaj teeb meem lub teeb.
Configure ntsuas tsis raws li qhov workpiece qhov ntev, ua kom daim phiaj scan hom uas subdivides deg rau hauv 50 mm × 50 mm sampling daim phiaj kom tiav qhov muag tsis pom - cheeb tsam. Cov khoom siv log, calibration daim ntawv pov thawj naj npawb thiab scan tsis tsim traceable soj ntsuam archives.
(3) Tag Nrho -Nto Ntiaj Teb Kev Tshawb Fawb Txog Kev Tshawb Fawb Cov Ntaub Ntawv
Tua tawm tsis siv neeg scanning raws li ua ntej - cov phiaj xwm kab sib chaws uas npog tag nrho cov khoom seem. Cov kws kho mob saib xyuas qhov tseeb- lub sijhawm ntsuas qhov xwm txheej, kho qhov muag txoj hauv kev ruaj khov thiab qhov sib txawv ntawm qhov sib txawv los daws qhov tsis txaus ntseeg tam sim. Flatness datasets rau txhua qhov sub- cheeb tsam pib- txuag thaum ua tiav los tiv thaiv cov ntaub ntawv poob. Sampling daim phiaj yog densified nyob ib ncig ntawm cov npoo thiab cov ces kaum uas muaj kev ntsuas qhov sib txawv los txhawb qhov precision hauv zos. Tom qab luam theej duab, lub interferometer tsim cov ntaub ntawv nyoos tag nrho -nto flatness cov ntaub ntawv teev npe qhov siab sib txawv ntawm txhua qhov piv txwv thiab cov ntaub ntawv ua ntej flatness yuam kev txheeb cais rau kev tsom xam downstream. Kev txheeb xyuas ua haujlwm tsis tu ncua yam tsis muaj kev cuam tshuam los khaws cov ntaub ntawv txuas ntxiv thiab kev ncaj ncees; Lub voj voog lub sij hawm ntsuas nrog workpiece loj.
(4) Kev ntsuas cov ntaub ntawv ua haujlwm & ntsuas qhov yuam kev kom ntsuas qhov ntsuas qhov sib txawv
Cov software tshwj xeeb txuam nrog tshem tawm cov suab nrov thiab tsis sib xws los ntawm cov ntaub ntawv nyoos scan:
Tsim ib qho 3D flatness yuam kev topography ntawm qhov chaw haum kom pom qhov pom qhov sib txawv, thaj chaw concave thiab sib txawv ntawm qhov sib txawv.
Xam tag nrho tag nrho - qhov ua yuam kev ntawm qhov chaw tiaj tus uas siv Txoj Cai Tsawg Squares rau JJG 117-2013 Kev Tshawb Fawb Txog Cov Ntawv Pov Thawj, txheeb xyuas qhov siab tshaj plaws / qhov sib txawv tsawg kawg thiab lawv qhov kev faib tawm spatial.
Correlate yuam kev hauv paus ua rau (residual machining stress, uneven mounting load, kub / humidity drift, thiab lwm yam) tiv thaiv tsim precision kam rau tsim lub hom phiaj calibration countermeasures.
Tsim cov ntaub ntawv soj ntsuam kos npe kos npe sau cov ntaub ntawv ua haujlwm tag nrho, cov ntaub ntawv nyoos thiab kev txheeb xyuas qhov yuam kev rau tag nrho cov cai thiab traceability.
3. Standard Full-Nto Flatness yuam kev Calibration Workflow rau Controllable Precision Ua raws
UNPARALLELED® tsim cov txheej txheem calibration raws tu qauv kom haum rau granite cov khoom siv, txais yuav qhov sib lawv liag: tsom precision sib tsoo → theem zoo hloov kho → theem nrab tag nrho - cheeb tsam tshuaj xyuas → ua raws validation rau kev kho kom raug:
Tsim cov kev npaj kho kom haum raws li kev txiav txim siab qhov chaw sib tsoo, cov khoom tshem tawm cov ntim thiab cov kev hloov kho raws li kev soj ntsuam yuam kev:
Kev sib txawv me me (tsawg dua lossis sib npaug li 0.003 mm): Kev ceev ultra-fine lapping kom tsis txhob dhau -machining.
Severe deviations (>0.003 mm): High- precision CNC sib tsoo cov cuab yeej rau kev tswj cov khoom tshem tawm, xyuas kom cov ncej- ua tiav qhov roughness Ra Tsawg dua lossis sib npaug li 0.01 μm.
Staged calibration nrog nruj precision saib xyuas: Ua raws li ntxhib - mus rau - kev hloov kho kom zoo, ntxhib - sib tsoo siab - thaj tsam sib txawv ua ntej ces zoo lapping. Ua qhov kev ntsuam xyuas hauv cheeb tsam laser interferometer tom qab txhua qhov kev sib tsoo los saib xyuas kev txhim kho kev txhim kho thiab tweak tsis txwv kom tsis txhob dhau / hauv qab kho. Ua kom ruaj khov kub thiab vibration tej yam kev mob thoob plaws hauv calibration.
Thib ob tag nrho -kev tshuaj xyuas thaj tsam kom paub tseeb qhov kev ua tau zoo: Rov ua tiav qhov ua tiav laser interferometer thoob ntiaj teb scan post-calibration, sib piv ua ntej- thiab tom qab-cov ntaub ntawv kho flatness los txheeb xyuas kev ua raws li kev tsim qauv (flatness Tsawg dua lossis sib npaug li 0.005 mm / m). Re- txheeb xyuas cov hauv paus hauv paus, kho cov txheej txheem calibration thiab rov ua haujlwm kom txog thaum flatness ua tau raws li cov lus qhia tshwj xeeb yog tias cov txiaj ntsig poob ntawm qhov ua siab ntev.
Tshaj tawm cov ntaub ntawv qhia txog kev ntsuas qhov tseeb thiab tsim kom tiav - cov txheej txheem archives: Cov ntaub ntawv calibration workflows, machining parameters thiab pre/post kho yuam kev sib piv, ua ntaub ntawv nrog rau thawj cov ntaub ntawv soj ntsuam. Tsim kom muaj qhov kawg-rau- xaus traceability logs kaw cov khoom siv serial tooj, xeem/calibration timestamps thiab tus neeg teb xov tooj daim ntawv pov thawj los txhawb kev lag luam thiab kev saib xyuas yav tom ntej.
4. Pov thawj Field Performance tsim kev lag luam Benchmark rau kev soj ntsuam & Calibration
UNPARALLELED®'s standardized laser interferometer ntiaj teb no soj ntsuam thiab flatness calibration workflow yog tag nrho deployed rau hauv - tsev ntau lawm QC thiab cov neeg siv khoom ntawm - site calibration cov kev pab cuam. Ntau tshaj 800 teeb ntawm granite loj xws li 3-12 m nyob rau hauv ntev thoob plaws semiconductor khoom, aerospace thiab precision tshuab cuab tam sectors tau raug tshuaj xyuas thiab calibrated. Field validation lees paub qhov muag tsis pom -zone-dawb puv-nto ntsuas nrog ntsuas qhov yuam kev Tsawg dua los yog sib npaug rau 0.002 mm thiab 100% kev ua raws cai tom qab-calibration.
Ib lub tuam txhab tsim khoom siv hluav taws xob hauv tsev tau tshaj tawm tias tom qab ntsuas nws 6 m granite huab cua -cov kabmob qhia lub hauv paus nrog cov txheej txheem txheej txheem no, qhov chaw tiaj tus zoo tuaj ntawm 0.012 mm / m txog 0.004 mm / m. Cov cuab yeej sib txuas ua haujlwm ruaj khov tau ua kom zoo dua qub, wafer tshuaj ntsuam xyuas qhov hloov pauv tau txo qis qis dua lossis sib npaug li 0.003 hli, thiab cov txiaj ntsig kev ntsuas tau nce los ntawm 96.5% mus rau 99.8%, txo cov cuab yeej siv nyiaj ntau. Txoj haujlwm ua haujlwm tau lees paub los ntawm lub koom haum metrology hauv tebchaws, nrog ntau dua 30 qhov tseeb cov tuam txhab tsim khoom thiab cov khoom siv siab - OEMs siv cov txheej txheem los txhim kho lawv cov kev tshuaj xyuas sab hauv thiab ntsuas qhov ntsuas nrog cov txiaj ntsig tau zoo.
Kev tswj hwm ntawm cov granite loj loj tsim cov ntsiab lus txuas hauv siab -kev tsim khoom kawg, thaum kev tshuaj ntsuam xyuas thiab ntsuas kev ua haujlwm raws li qhov tseem ceeb ntawm kev lees paub qhov tseeb. Tau ntau xyoo, kev lag luam tsis muaj kev sib koom ua ke rau kev sim ua haujlwm loj thiab kho, ua rau tsis sib haum nrog cov qauv kev tswj hwm uas cuam tshuam rau kev nce qib siab ntawm - khoom tsim khoom kawg. UNPARALLELED®'s tshiab tso tawm laser interferometer thoob ntiaj teb kev tshuaj xyuas thiab cov txheej txheem flatness calibration puv qhov kev lag luam sib txawv. Los ntawm cov txheej txheem kev ua haujlwm zoo, ua kom zoo dua qub, kev tswj xyuas qhov loj me ntawm cov qauv granite loj yog pom tau, xa cov khoom siv rov qab rau siab - kev txhim kho kev lag luam zoo.