Hauv cov khoom siv tshuaj ntsuam xyuas semiconductor, ntsuas qhov ntsuas qhov muag thiab huab cua -cov kabmob cov kab sib txuas, cov khoom siv granite siv los ua cov qauv ntsuas ntawm tag nrho cov kab ke. Lawv qhov seem stability ncaj qha tswj kev ntsuas repeatability thiab positioning raug ntawm cov cuab yeej. Ntau lub tuam txhab tsim khoom tau ua tiav qhov tsim nyog tau txais txiaj ntsig thaum lub sij hawm tsim qauv, tab sis tseem ntsib qhov tseeb drift tom qab ntev - lub sijhawm ua haujlwm hauv huab hwm coj - kev cob qhia ntau lawm. Tom qab tshem tawm qhov yuam kev ntawm kev sib dhos thiab cov kabmob huab cua tsis ua haujlwm, qhov hloov pauv ntawm qhov kub thiab av noo feem ntau cuam tshuam qhov tshwm sim. Cov neeg yuav khoom feem ntau tsuas yog tsom rau qhov ultra- qis thermal expansion coefficient ntawm granite, tab sis underestimate lub composite deformation induced los ntawm coupling nyhuv ntawm kub gradients thiab nruam vaum hloov. Raws li muaj ntau ntawm -site taug qab cov ntaub ntawv los ntawm ntau qhov haujlwm, UNPARALLELED txheeb xyuas cov txheej txheem ntawm qhov kub thiab av noo cuam tshuam rau qhov ntev- lub sij hawm precision ntawm granite siv qhov chaw los ntawm ntau qhov kev pom, muab cov ntaub ntawv rau kev xaiv cov khoom siv, cov kab ntau lawm thiab cov txheej txheem ua haujlwm.
Kev nthuav dav thiab kev cog lus tshwm sim los ntawm qhov sib txawv ntawm qhov kub thiab txias tuaj yeem raug kwv yees los ntawm cov khoom siv. Txawm li cas los xij, qhov ntsuas kub hauv cheeb tsam feem ntau pom nyob rau hauv kev cob qhia kev lag luam ua rau muaj kev cuam tshuam ntau dua li qhov sib txawv ntawm qhov kub thiab txias. Thaum ib sab ntawm lub platform granite nyob ze rau cov khoom siv hluav taws xob xws li cov motors thiab lub teeb pom kev zoo thaum lwm sab tseem nyob ntawm qhov kub thiab txias, qhov kub thiab txias sib txawv hauv cov khoom. Qhov tsis sib xws micro- nthuav dav tshwm sim hauv thaj chaw sib txawv thiab ua rau muaj kev sib ntaus sib tua me ntsis. Xws li deformation yog thim rov qab elastic deformation, tab sis nws hloov qhov flatness thiab ncaj ntawm lub dav hlau siv nyob rau lub sijhawm. Rau loj- loj granite kab teeb thiab dav- cov ntaub ntawv ua haujlwm, qhov ntev ntawm qhov kub thiab txias gradients yooj yim qaij lub mounting siv ntawm cov lus qhia rails thiab ncaj qha ua rau qhov tsis raug ntawm cov lus tsa suab. Txawm hais tias qhov kub thiab txias rov qab los rau tus nqi pib, rov ua dua qhov sib txawv ntawm qhov sib txawv ntawm qhov kub thiab txias nyob rau lub sijhawm ntev yuav maj mam rov txhim kho qhov kev ntxhov siab sab hauv ntawm lub pob zeb thiab tsim kom tsis txhob muaj qhov deformation mus tas li.
Kev cuam tshuam ntawm cov av ntawm granite yog feem ntau underestimated los ntawm kev lag luam. Ntuj granite muaj interconnected los yog kaw me me capillary pores. Thaum ambient humidity nce, dej vapor hauv huab cua maj mam nkag mus rau hauv qhov hws thiab ua rau me ntsis noo noo nqus nthuav dav ntawm pob zeb nto. Thaum cov av noo poob, noo noo evaporates thiab nto shrinks. Raws li kev hloov pauv qhuav- ntub dej, rov nthuav dav thiab sib cog lus ntawm qhov chaw tsim deformation tsis sib xws ntawm qhov chaw thiab cov tub ntxhais ntawm cov khoom, inducing micro stress on the surface. Qhov kev hloov pauv ntawm qhov tseeb zoo li tsis tseem ceeb hauv luv luv- kev soj ntsuam lub sijhawm, tsis tau xyoo ntawm kev ua haujlwm cyclic ua rau muaj kev puas tsuaj ntawm qhov chaw micro-waviness. Rau precision siv platforms nruab nrog huab cua- bearing grooves thiab nqus adsorption nto, noo noo nqus nyob rau hauv pores kuj impairs nto sealing thiab cuam tshuam lub stability ntawm huab cua films. Txawm hais tias chav huv huv muaj qhov kub thiab txias tsis tu ncua, cov av noo hloov pauv tau tsim los ntawm cov tshuab humidification ua rau muaj kev cuam tshuam rau cov khoom siv granite.
Lub coupling nyhuv ntawm kub thiab av noo amplifies precision poob los ntawm ib puag ncig yam. Nyob rau hauv siab - kub thiab siab - cov av noo, dej vapor nkag mus nrawm dua thiab kev nqus dej noo nthuav dav dua. Nyob rau hauv qis- qhov kub thiab txias ib puag ncig, qhov seem sab hauv ntawm pob zeb zoo li tso tawm yooj yim dua. Ntau cov kab ntau lawm ua haujlwm tsis tu ncua nyob rau nruab hnub thiab kaw thaum hmo ntuj, nrog rau synchronous kub thiab av noo hloov ntawm nruab hnub thiab hmo ntuj. Granite reference Cheebtsam yog raug rau cyclic loading ntawm "expansion-contraction". Txhua qhov rov pib dua ntawm cov cuab yeej coj hloov maj mam hloov mus rau lub xeev geometric ntawm kev siv, yuav tsum tau calibration nquag thiab txo cov sijhawm ua haujlwm ntawm cov kab ntau lawm. Hauv nano- teev kho qhov muag thiab wafer metrology scenarios, downtime poob los ntawm kev rov calibration ua rau cov neeg siv khoom cov nqi ntau lawm.
Lub hauv paus compactness ntawm cov ntxhia muaj pes tsawg leeg txiav txim siab lub peev xwm innate ntawm granite los tiv thaiv qhov kub thiab txias cuam tshuam. Ordinary granite with dense pores and loose mineral crystals provides more channels for water vapor penetration and suffers larger deformation triggered by temperature and humidity changes. UNPARALLELED® tus tswv dub granite tau soj ntsuam cov khoom siv nruj nruj thiab cov yam ntxwv tsis tshua muaj porosity thiab ntom ntom zoo -cov qauv nplej, ua kom cov dej vapor nkag mus tau zoo thiab txo qis kev nthuav dav thiab kev cog lus los ntawm kev nqus dej noo. Txawm li cas los xij, cov khoom siv zoo tshaj plaws tsis tuaj yeem cais tag nrho cov kev cuam tshuam ib puag ncig. Yog li ntawd, peb txais yuav ntau-theem tas mus li- qhov kub thiab txias kev kho mob thaum lub sij hawm ua kom maj mam tso cov kev ntxhov siab sab hauv ntawm pob zeb thiab txo cov kev pheej hmoo ntawm deformation mus tas li nyob rau hauv alternating ib puag ncig tej yam kev mob.
Optimized processing tsim kuj tuaj yeem txo cov kev phom sij ntawm qhov kub thiab av noo. Rau ntev -siv kab teeb thiab loj- hom platforms, peb ua kom zoo dua phab ntsa thickness kom tsis txhob muaj cua sov tsis sib xws thiab nqus noo noo uas ua rau cov tuab tsis sib xws. Gradient ultra-precision lapping yog siv rau qhov siab -precision reference thaj chaw kom txo tau cov subsurface machining puas txheej thiab tiv thaiv dej infiltration raws microcracks. Cov lus qhia txog kev txhim kho yog muab rau cov neeg siv khoom thaum xa khoom: tsis txhob txuas cov khoom siv los ze rau cov cua sov- tsim cov khoom thiab khaws cov cua kub dissipation. Qhov twg ua tau, siv ib feem ntawm ib puag ncig kev sib cais rau cov tub ntxhais granite siv thaj chaw kom txo qis kev poob siab los ntawm qhov kub thiab txias gradients thiab av noo hloov pauv.
Kev ncua ntev -lub sij hawm precision ntawm granite siv cov khoom siv tsis tuaj yeem cia siab rau ntawm cov khoom siv. Nws yuav tsum muaj kev sib koom tes ntawm kev xaiv cov khoom siv raw, kev ntxhov siab- kev siv lub tshuab nyem thiab ntawm - thaj chaw tswj hwm ib puag ncig. Cov ntaub ntawv hauv paus tau teeb tsa qis dua ntawm kev tiv thaiv - muaj peev xwm cuam tshuam rau ib puag ncig, kev tsim cov txheej txheem precision txo qhov kev pheej hmoo deformation, thiab tsim nyog rhiav layout suppresses kub thiab av noo hloov pauv. UNPARALLELED tsis tu ncua kawm txog kev sib raug zoo ntawm ib puag ncig yam thiab deformation ntawm granite Cheebtsam, thiab customizes ultra-precision granite siv cov khoom haum rau ntau yam kev ua haujlwm. Peb pab thoob ntiaj teb optoelectronic thiab semiconductor khoom manufacturers txo ib puag ncig-induced precision drift, txiav cov khoom siv calibration zaus thiab lav ruaj khov ntev{10}}lub sijhawm ua haujlwm ntawm cov khoom.