Ntau qhov chaw ntawm imperceptible low-frequency micro-vibration muaj nyob rau hauv semiconductor huv-chav, tsim los ntawm lub tshuab nqus tsev twj, nyiaj siv ua haujlwm tuav cranes, kiv cua thiab cov cuab yeej ua haujlwm nyob ib sab. Cov kev vibrations no nthuav tawm los ntawm cov plag tsev thiab cov qauv tsim rau hauv cov khoom siv ntau lawm. Rau kev tshuaj xyuas wafer, kev sib txuas thiab cov cuab yeej lithography, nanometer-theem jitter yuav ua rau cov duab tsis meej pem, kev sib dhos offset thiab overlay yuam kev, ncaj qha ua rau wafer seem thiab tawm los poob. Ntau lub tuam txhab tsim khoom siv cov txheej txheem kev co sab nraud los txo cov kev cuam tshuam kev co. Txawm li cas los xij, cov neeg sib cais tsuas tuaj yeem lim ib feem ntawm cov kev co sab nraud, nrog rau kev txhim kho tsuas yog tiv thaiv tus kheej zoo siab vibration uas tsim los ntawm cov cuab yeej ntawm cov khoom txav mus los. Sib txawv ntawm cov hlau thav duab, granite gantry cov qauv siv lub zog vibration ntawm cov qauv tsim los ntawm kev tsim txiaj ntawm cov khoom siv sab hauv-damping yam ntxwv. Nws suppresses ob qho tib si sab hauv thiab sab nraud kev co, zoo txaus siab ua hauj lwm-txheej xwm yuav tsum tau ntawm semiconductor ntau lawm kab.
Nws tus kheej zoo siab vibration yog yam tsis muaj kev cuam tshuam thaum lub sijhawm ua haujlwm siab ntawm cov khoom siv semiconductor. Linear motors thiab zawv zawg theem mounted rau gantry crossbeams ua rau poob siab kev co thaum lub sij hawm high-speed pib-stop thiab reciprocating scanning. Hlau thiab cam khwb cia hlau gantry muaj qhov ua haujlwm tsis zoo. Thaum vibration tshwm sim, nws decays maj mam thiab generates tsis tu ncua structural ringing. Kev co reverberates nyob rau hauv lub thav duab thiab xa mus rau cov tub ntxhais cov rooj sib tham nrog rau optical lo ntsiab muag, interferometers thiab wafer theem. Txhawm rau kom tsis txhob muaj kev vibration-induced tsis xws luag, cov cuab yeej yuav tsum tau txo qis kev txav mus los thiab ntxiv sijhawm ncua sij hawm, uas ncaj qha txo qis tag nrho cov khoom. Thanks to dense crystalline texture, granite dissipates vibration energy rapidly through internal friction among grain boundaries and greatly shortens residual‑vibration duration. Cov khoom sib dhos ua kom ruaj khov sai sai tom qab ua tiav kev txav. Kev ncua ntev tos latency tsis tsim nyog, tso cai rau cov cuab yeej ua kom tiav ob qho tib si nanometer-theem qhov chaw raug thiab siab dhau mus rau kev kub ceev wafer-scanning-kev soj ntsuam scenarios.
Externally kis micro-vibration yog lwm qhov nyuaj rau cov cuab yeej semiconductor. Txawm hais tias nrog kev kho vaj tse kev co-txo-txo rau chav huv, cov khoom siv nyob ib puag ncig pib-nres thiab overhead-crane taug kev tsis tu ncua tso tawm kev co excitation mus rau hauv pem teb. Hlau gantries ua raws li kev vibration kis tau tus mob thiab ua me me hauv pem teb vibrations upward unimpeded rau actuators. Tau txais txiaj ntsig los ntawm kev ua kom muaj zog-dhau los ntawm cov khoom siv inertia thiab cov khoom damping, granite gantries tsis muaj zog nce kev sib kis tau zoo ntawm kev co hauv pem teb, tsim ib qho kev vibration-buffering barrier rau tag nrho lub tshuab. Nws txo cov kev cuam tshuam rau optical paths thiab metrology systems. Txawm tias nyob rau hauv me me keeb kwm kev vibration hauv kev cob qhia, huab cua-bearing theem thiab kho qhov muag modules ntsia rau ntawm lub gantry tuav ruaj khov cov ntaub ntawv thiab txo over-reliance ntawm sab nraud vibration isolators.
Resonance zam muab cov txiaj ntsig zoo rau cov khoom siv semiconductor. Txhua lub thav duab mechanical muaj lub ntuj resonant zaus. Thaum rhiav excitation zaus coincides nrog cov khoom siv lub ntuj zaus, resonance amplification tshwm sim thiab nthuav me me vibration drastic, rhuav tshem cov txheej txheem stability instantly. Cov thav duab hlau zoo li muaj ntau qhov sib txawv ntawm qhov sib txawv ntawm kev cob qhia-vibration bands, ua rau muaj kev pheej hmoo ntawm resonance. Nws tus kheej hnyav thiab txaus damping ntawm granite gantries hloov lub zuag qhia tag nrho ntuj zaus ntawm cov khoom tiav. Txawm hais tias mus txog qhov kev sib tw resonance, siab damping suppresses resonance amplitude thiab tiv thaiv kev vibration amplification. Nws lav cov txheej txheem kev ruaj ntseg thaum lub sijhawm 24/7 tsis nres ntau lawm thiab zam cov khoom loj wafer tshwm sim los ntawm cov xwm txheej tsis tau xav txog.
Kev vibration kis tau tus mob ntawm cov qauv kev sib koom ua ke kuj tseem ceeb rau kev ua haujlwm loj-ntev mus ntev. Hlau gantry feem ntau yog sib dhos los ntawm kev sib txuas ntawm vuam thiab ntsia hlau. Vibration hloov dua siab tshiab hla splices thiab bolt interfaces. Lub sij hawm ntev cyclic vibration yuav loosen cov connectors thiab ntxiv degrade kev co-damping kev ua tau zoo, yuav tsum tau nyob rau lub sij hawm ntawm qhov chaw retightening thiab calibration. Monolithically hauv av granite gantries tshem tawm ntau qhov sib txuas sib txuas thiab thaiv kev vibration kis tau tus mob. Tsis muaj kev pheej hmoo zais ntawm bolt loosening nyob rau hauv cyclic vibration. Nws lub peev xwm vibration-damping tsis degrade tshaj ntau-hloov mus tas li ntau lawm, txo cov kab ntau lawm downtime thiab sib piv high-siv-tus nqi yuav tsum tau ntawm semiconductor fabs.
Txawm li cas los xij, tsis yog txhua yam khoom siv pob zeb ua rau muaj kev cuam tshuam kev co-damping. Ordinary marble muaj ntau sab hauv fissures thiab xoob nplej nrog tsis zoo damping peev. Nws ua tsis tau kom dissipate vibration zog zoo thiab ua tsis tau raws li nanometer-theem txheej txheem yuav tsum tau rau semiconductor manufacturing. UNPARALLELED Group siv nruj nruj-ore tshuaj ntsuam xyuas thiab tsis lees paub cov pob zeb nrog cov kab nrib pleb sab hauv thiab tsis sib xws ntawm cov nplej. Kev txhawb nqa los ntawm qhov loj-loj monolithic-kev ua haujlwm muaj peev xwm thiab kev ntsuas kev ntsuas ntsuas ntsuas, lub tuam txhab hloov cov peev txheej hauv kev vibration-damping peev xwm ntawm granite rau hauv lub ntiaj teb kev ua tau zoo thiab ua kom muaj kev ruaj ntseg rau cov khoom siv semiconductor.
Los xaus, lub peev xwm vibration-damping ntawm granite gantries yog ntau tshaj li cov khoom siv yooj yim. Nws hais txog cov teeb meem nyuaj micro-vibration nyob rau hauv cov kab ntau lawm semiconductor los ntawm ntau qhov ntev: suppressing tus kheej-excited residual vibration, attenuating sab nraud kev co, txwv tsis pub resonance amplitude thiab zam kev degradation los ntawm spliced lug. Nws tiv thaiv nanometer-theem raug thaum lub sij hawm wafer ua thiab tshuaj xyuas thiab pab fabs tswj chip-tsim tawm los.