Nyob rau hauv lub ntiaj teb no ntawm semiconductor fabrication thiab precision optics, kev ntsuas tsis yog hais txog qhov tseeb -nws yog hais txog kev ruaj ntseg kiag li, repeatability, thiab compatibility nrog huab ib puag ncig. Cov khoom siv hlau los yog polymer-raws li cov ntsuas feem ntau poob qis hauv chav huv huv, siab - zaus ntsuas ntsuas, lossis nanometer- ntsuas qhov ntsuas siab.
Nkag mus rau cov cuab yeej siv hluav taws xob zoo tshaj plaws - engineered los ntawm qib siab zirconia (ZrO₂) thiab alumina (Al₂O₃) cov khoom sib xyaw, cov khoom no tau dhau los ua tus qauv kub rau kev tshuaj xyuas tseem ceeb hauv wafer fabs, optical lens ntau lawm kab, thiab lub teb chaws - qib kev soj ntsuam kuaj.
Ntawm no yog tsib qhov zoo tshaj plaws uas ua rau cov ceramics tsis yog tsuas yog nyiam tshaj -tab sis feem ntau irreplaceable- nyob rau hauv siab - daim ntawv thov nrhiav kawg.
1. Nyob ze -Zero Thermal Expansion – Stability ntawm Nanoscale
Vim li cas nws tseem ceeb: Kev hloov pauv 1℃tuaj yeem ua rau microns ntawm qhov yuam kev tshwm sim hauv kev teeb tsa cuam tshuam cuam tshuam.
Precision structural ceramics nthuav tawm cov coefficient ntawm thermal expansion (CTE) tsawg li 0.5–1.0 × 10⁻⁶ /℃- qis dua stainless hlau (~ 16 × 10⁻⁶ / degree) thiab txawm Invar alloy (~ 1.2 × 10⁻). Qhov no ua kom muaj kev ncaj ncees ntawm qhov sib txawv ntawm qhov kub thiab txias hauv 24/7 fab kev ua haujlwm.
Qhov tshwm sim: Ceramic gauge blocks thiab siv spheres tswj calibration rau lub hlis tsis muaj drift, txo recalibration zaus txog li 70%.
2. Exceptional Wear & Scratch Resistance - Ua rau siab -Kev siv lub voj voog
Vim li cas nws tseem ceeb: Kev sib txuas lus rov qab thaum lub sij hawm kev soj ntsuam tsis zoo degrades cov ntaub ntawv mos, qhia kev ntsuas kev tsis ncaj ncees.
Nrog Vickers hardness qhov tseem ceeb tshaj 1200 HV (vs. ~ 200 HV rau hardened steel), precision ceramics tiv thaiv puas los ntawm silicon wafers, sapphire substrates, thiab pob zeb diamond-tipped probes. Nto roughness tseem ruaj khov ntawm Ra Tsawg dua lossis sib npaug rau 0.01 µm txawm tias tom qab 100, 000+ kev sib cuag.
Daim ntawv thov piv txwv: Peb ZrO₂ wafer edge gauges siv nyob rau hauv EUV lithography alignment qhia xoom ntsuas hnav tom qab 18 lub hlis ntawm kev ua haujlwm tas li.
3. Cov rwb thaiv tsev hluav taws xob zoo meej - Tsis muaj kev pheej hmoo ntawm ESD lossis tam sim no cov dej xau
Vim li cas nws tseem ceeb: Hauv semiconductor metrology, txawm tias micro- amp to tuaj yeem ua rau cov khoom siv rhiab lossis cuam tshuam cov txiaj ntsig kev ntsuas hluav taws xob.
Ceramics are inherently non-conductive (volume resistivity >10¹⁴ Ω·cm), tshem tawm cov kev pheej hmoo ntawm:
Electrostatic tawm (ESD) thaum tuav
Parasitic tam sim no hauv cov chaw soj ntsuam
Teeb liab cuam tshuam hauv electron-beam lossis AFM systems
Qhov no ua rau lawv zoo tagnrho rau siv nyob ze photomasks, MEMS sensors, thiab quantum computing test fixtures.
4. Tsis yog-Magnetic & RF-pob tshab - cuam tshuam-dawb nyob rau hauv ib puag ncig rhiab heev
Yog vim li cas nws tseem ceeb: Sib nqus teb los ntawm cov cuab yeej tuaj yeem cuam tshuam cov kab hluav taws xob lossis cuam tshuam cov khoom sib nqus cia khoom kuaj.
Precision ceramics muaj xoom ferromagnetic ntsiab, ua kom muaj kev sib raug zoo nrog:
SEM/TEM imaging kab
MRI-cov cuab yeej siv tau zoo
Spintronic thiab sib nqus nco R & D
Tsis tas li ntawd, lawv qhov xwm txheej dielectric tso cai rau kev sib koom ua ke rau hauv RF thiab microwave kev teeb tsa yam tsis muaj teeb meem xav txog lossis txo qis.
5. Ultra-Clean & Chemically Inert – Tsim los rau ISO Class 1–5 Cleanrooms
Yog vim li cas nws tseem ceeb: Outgassing, particle shedding, los yog chemical reactivity yuav paug wafers los yog optical coatings.
Peb cov cuab yeej ceramic precision yog:
Non-porous (density >99.5%) → tsis nqus dej los yog microbial loj hlob
Resistant rau cov kua qaub, cov hauv paus, thiab cov kuab tshuaj (xws li HF vapor, SC1 / SC2 ntxuav)
Tsawg outgassing (raws li ASTM E595: TML<0.1%, CVCM <0.01%)
Tsis yog-txo qis hauv ultrasonic lossis plasma tu
Muaj ntawv pov thawj rau siv hauv ISO 14644-1 Chav Kawm 1 ib puag ncig-tus qauv huv huv tshaj plaws hauv kev lag luam.
Tiag -Kev thov thoob ntiaj teb thoob plaws kev lag luam
Semiconductor: Wafer thickness gauges, reticle clamping pins, sojntsuam daim card alignment jigs
Optics: Interferometer reference flats, lens centering tes tsho, asphere metrology zes
Kev tshawb fawb Labs: Cryogenic ntsuas fixtures, nqus chamber positioning theem, atomic moos Cheebtsam
Vim li cas "Zoo txaus" tsis txaus
Cov cuab yeej hlau tuaj yeem txaus rau kev ua haujlwm dav dav-tab sis nyob rau hauv qhov chaw uas ib tus nanometer txhais tau tias kev ua tiav lossis tsis ua tiav, cov khoom xaiv tau dhau los ua lub luag haujlwm- tseem ceeb. Precision ceramics tshem tawm qhov txawv txav: tsis muaj thermal creep, tsis muaj magnetic hysteresis, tsis muaj corrosion, tsis muaj ESD.
Ntawm Unparalleled Group, peb tsim cov ntawv pov thawj precision ceramic metrology cov cuab yeej rau:
ISO 3650 Cov khoom lag luam geometric specifications
SEMI F57 (semiconductor tuav cov ntaub ntawv)
MIL-STD-883 (cov txheej txheem kuaj microelectronics)
Txhua yam khoom siv laser interferometry, CMM validation, thiab cleanroom ntim ua ntej xa zaub mov.