Nyob rau hauv lub cheeb tsam ntawm kev ntsuas microscopic-txawm yog rau kev tshuaj ntsuam xyuas semiconductor wafer, kev tsim khoom siv kho mob, lossis siab -kawg tshawb fawb txog roj ntsha- qhov ntsuas iav qhov tseeb yog lub plawv dhia ntawm koj qhov chaw nyob. Nws txhais lub cev txav mus rau hauv cov ntaub ntawv digital nrog nanometer- theem daws teeb meem.
Txawm li cas los xij, txawm tias lub taub hau nyeem ntawv kho qhov muag siab tshaj plaws tuaj yeem tsim cov ntaub ntawv tsis raug yog tias qhov ntsuas nws tus kheej raug cuam tshuam los ntawm ib puag ncig, kev daws teeb meem, lossis cov khoom siv hauv vaj tse. Rau R & D engineers thiab cov thawj coj zoo hauv kev lag luam kho qhov muag, kev nkag siab txog cov pitfalls no tseem ceeb heev.
Ntawm Unparalleled Group, peb tshwj xeeb hauv Precision Glass Processing uas txo cov kev pheej hmoo ntawm qhov chaw. Hauv qhov kev Q&A cov txuj ci no, peb hais txog peb qhov kev ua yuam kev ntau tshaj plaws uas tau ntsib hauv cov tshuab ntsuas microscopic thiab muab cov kev daws teeb meem los xyuas kom koj cov ntaub ntawv tseem muaj kev ntseeg siab.
Q1: "Peb lub kaw lus qee zaus tshaj tawm txoj hauj lwm tam sim ntawd dhia lossis teeb liab poob. Puas yog cov kab kos ntawm lub iav tuaj yeem ua txhaum?"
Qhov teeb meem: Nto teeb meem thiab teeb liab tawg
Yog lawm. Nyob rau hauv siab - daws teeb meem microscopic systems, tus nyeem ntawv kho qhov muag tso siab rau qhov huv, tsis muaj kev cuam tshuam qhov sib txawv ntawm cov grating lossis encoded qauv ntawm cov iav nto. Txawm hais tias lub microscopic khawb (feem ntau pom tsis pom ntawm qhov muag liab qab) tshwm sim los ntawm kev tu tsis raug lossis kev sib cuag thaum lub rooj sib txoos tuaj yeem tawg lub teeb ci.
Qhov cuam tshuam: Qhov kev tawg no txo cov teeb liab - rau - suab nrov piv (SNR), ua rau tus nyeem ntawv tsis nco qab los yog tsim "glitches" uas tshwm sim tam sim ntawd txoj hauj lwm dhia lossis ua tiav cov teeb liab poob.
Kev pheej hmoo: Hauv kev sib dhos kho mob tsis siv neeg lossis kev txheeb xyuas cov khoom siv semiconductor, ib qho kev tsis sib haum xeeb tuaj yeem ua rau cov khoom tsis lees paub lossis cov khoom tsis raug.
Txoj kev daws teeb meem tsis sib xws: Super-Polishing thiab tiv thaiv txheej
Cov tshuaj pib nrog superior Precision iav ua.
Super-Polished Substrates: Peb siv chemical-mechanical polishing (CMP) cov txheej txheem kom ua tiav qhov roughness qhov tseem ceeb (RaRa) qis dua 0.5 nm. Qhov no txo qis qhov cuam tshuam hauv paus thiab ua kom ntseeg tau tias txhua qhov tsis xws luag tuaj yeem pom tseeb tawm tsam ultra- tom qab du, ua rau nws yooj yim dua rau kev ua yuam kev - kho cov algorithms los lim.
Kev tiv thaiv lub tsho tawv tawv: Peb siv cov pob zeb diamond uas muaj tswv yim- zoo li cov pa roj carbon (DLC) lossis cov txheej tawv tawv oxide ncaj qha rau ntawm qhov chaw kawm tiav. Cov txheej txheej no ua rau muaj qhov tawv tawv (txog 9H), ua rau cov nplai tiv thaiv khawb los ntawm kev tu txhua hnub lossis kev sib cuag nrog cov wipers.
Tsis zoo-Free Grating Lithography: Peb cov txheej txheem lithography xyuas kom meej tias cov kab grating lawv tus kheej tsis muaj ntug roughness, uas feem ntau yuam kev rau khawb los ntawm cov neeg nyeem rhiab heev.
Cov Lus Qhia Tshwj Xeeb: Tsis txhob siv cov ntaub abrasive lossis cov kuab tshuaj txheem ntawm cov nplais iav. Siv cov lint nkaus xwb- cov ntaub so dawb thiab pom zoo kho qhov muag- cov tshuaj ntxuav qib.
Q2: "Txawm hais tias kev tu tsis tu ncua, peb qhov ntsuas ntsuas tau dhau sijhawm, thiab peb pom 'dab' nyeem nyob ze ntawm cov npoo. Puas yog qhov teeb meem sib kis?
Qhov Teeb Meem: Residual Contamination thiab Refractive Index Variation
Kev ntxuav yog tsim nyog, tab sis kev tu tsis raug yog qhov tseem ceeb ntawm kev ua yuam kev. Cov roj seem ntawm cov ntiv tes, cov plua plav, lossis cov streaks los ntawm cov kuab tshuaj evaporating tsim ib zaj duab xis nyias ntawm lub khob.
Lub Physics: Cov nplais iav ua haujlwm los ntawm kev xa lossis cuam tshuam lub teeb los ntawm txoj hauv kev tshwj xeeb. Ib txheej kab mob muaj qhov sib txawv refractive index dua li iav los yog cua. Qhov no hloov txoj kev kho qhov muag ntev thiab theem hloov ntawm lub teeb, ua rau kev ntsuas kev ua yuam kev hu ua "Abbe yuam kev" lossis cov teeb liab tsis sib xws.
Cov nyhuv: Qhov no feem ntau tshwm sim raws li qhov qeeb qeeb hauv xoom- txoj hauj lwm lossis tsis yog - cov kab sib txawv uas txawv nyob ntawm qhov chaw nyeem lub taub hau txheeb ze rau cov smudge.
Cov tshuaj tsis sib xws: Hydrophobic / Oleophobic Surface Treatments
Kev tiv thaiv zoo dua li kho. Peb qhov kev ua tiav qib siab suav nrog kev siv cov molecular- qib hydrophobic thiab oleophobic txheej.
Tus kheej-Tsev nyhuv: Cov txheej txheem no txo qis lub zog ntawm lub khob, ua rau cov roj thiab dej hlaws thiab dov tawm es tsis txhob kis mus rau hauv zaj duab xis. Qhov no ua rau kev saib xyuas niaj hnub ua tau zoo dua thiab tsis tshua muaj.
Uniform Optical Path: Los ntawm kev tiv thaiv kev sib sau ntawm cov yeeb yaj kiab tsis sib xws, peb xyuas kom meej tias qhov ntsuas qhov cuam tshuam ntawm txoj kev lub teeb tseem nyob tas li (cua- rau- iav), khaws cia kev ncaj ncees ntawm cov qauv cuam tshuam siv rau kev ntsuas.
Cleanroom Compatibility: Peb cov nplai raug ntxuav thiab ntim rau hauv ISO Class 4 (lossis zoo dua) cov chav huv huv kom ntseeg tau tias lawv tuaj txog tsis muaj teeb meem, tshem tawm cov "pib drift" feem ntau pom tom qab kev teeb tsa.
Q3: "Peb lub chaw kuaj ntsuas kub hloov pauv me ntsis, thiab peb pom qhov ua yuam kev tsis sib xws. Puas yog iav nthuav dav, lossis nws puas yog qhov tshwm sim kho qhov muag?
Qhov teeb meem: Thermal Expansion and Refractive Index Temperature Dependence
Thaum iav muaj qhov qis Coefficient ntawm Thermal Expansion (CTE) dua li hlau, nws tsis yog xoom. Ntau subtly, lub refractive index ntawm iav hloov nrog kub (dn / dTdn / dT ).
Cov nyhuv: Hauv cov nplais interferometric lossis diffractive, kev hloov pauv hauv qhov kub thiab txias ua rau ob yam:
Physical Expansion/Contraction: Lub suab ntawm lub grating hloov lub cev.
Optical Path Hloov: Qhov ceev ntawm lub teeb los ntawm cov iav substrate hloov vim qhov hloov pauv qhov ntsuas qhov ntsuas.
Yog tias tsis raug kho, cov no ua ke los tsim qhov teeb meem tseem ceeb (piv txwv li, ntsuas 100.05 mm thaum qhov tseeb qhov deb yog 100.00 mm).
Txoj kev daws teeb meem uas tsis sib xws: Tsawg-CTE Cov Khoom Siv thiab Cov Qauv Hluav Taws Xob
Rau cov ntawv thov uas xav tau kev ruaj khov heev, cov dej qab zib txheem txheem -cov kua qaub lossis borosilicate iav tsis txaus.
Zero-Expansion Glass Ceramics: Peb muab cov nplai tsim los ntawm cov iav tshwj xeeb-ceramics (zoo ib yam li Zerodur® sib npaug) nrog CTE ze 0 ± 0.05 × 10⁻⁶ / K dhau qhov kub ntawm qhov dav. Qhov no zoo li tshem tawm lub cev nthuav dav.
Athermal Grating Design: Los ntawm kev ua tiav Precision iav, peb tuaj yeem ua ntej - them nyiaj rau lub grating suab thaum lub sij hawm lithography raws li qhov xav tau ntawm kev ua haujlwm kub, tshem tawm qhov ua yuam kev thermal.
Kev Pabcuam Kev Xaiv Cov Khoom: Peb pab pawg neeg tsim khoom pab koj xaiv cov khoom siv zoo (Fused Silica vs. Iav Ceramic vs. Low-Expansion Glass) raws li koj qhov tshwj xeeb thermal ib puag ncig, kom ntseeg tau tias ob qho tib si lub cev thiab kho qhov muag thermal yuam kev raug txo kom tsawg.
Vim li cas koom tes nrog Unparalleled Group rau Optical Scales?
Hauv kev sib tw ntawm cov khoom siv kho mob thiab cov khoom siv semiconductor, tsis muaj chaw rau kev ntsuas qhov tsis meej. Lub iav nplai tsis yog ib daim iav xwb; nws yog ib tug precision optical tivthaiv uas xav tau kev txawj ntse nyob rau hauv cov ntaub ntawv science, lithography, thiab nto engineering.
Unparalleled Group muab ntau tshaj li cov khoom siv xwb; peb xa cov ntawv pov thawj raug.
Xaus-rau-Kev Tswj Xyuas Kawg: Los ntawm kev xaiv cov khoom siv raw mus rau qhov kawg laser interferometer calibration.
Customization: Cov txheej txheej, qhov ntev, thiab grating pitches kom phim koj tus nyeem ntawv tshwj xeeb.
Kev Pabcuam Kev Pabcuam: Kev nkag ncaj qha rau peb cov kws kho qhov muag kho qhov muag los daws cov teeb meem kev sib koom ua ke.
Xyuas kom koj lub tshuab ntsuas microscopic ua haujlwm ntawm lawv qhov kev txwv. Xaiv cov iav nplai engineered kom zoo meej.
Npaj kom zoo rau koj txoj kev kho qhov muag?
Hu rau peb pab pawg muag khoom niaj hnub no rau kev sib tham ntawm kev cai Precision Glass Processing kev daws teeb meem.